Aerotech ABL9000 Series, Руководство пользователя

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Operating Specifications ABL/ABLH9000 Series Stage User's Manual
Table 3-3: ABL/ABLH9000 Series Resolution Information
Code Signal Period Travel/Step Multiplier
Maximum
Speed
LN 4 µm 0.004 µm - 1.2 µm Requires
External
System Data
Rate
LZR 316.5 µm 79nm Integral λ/8 500 mm/s
(1)
LZR 316.5 µm .3nm - 15.8nm Requires
External
System Data
Rate
Code Maximum Speed Signal Type Encoder Connector
LN System Data Rate
LZR 500 mm/s
(1)
LZR System Data Rate
1. Requires system data rate of at least 14 MHz
Figure 3-1: Velocity vs. resolution as a function of system data rate (ABL/ABLH9000 with LTAS or LNAS
encoder)
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