Aerotech ABL9000 Series, Руководство пользователя

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ABL/ABLH9000 Series Stage User's Manual Operating Specifications
Basic Model ABLH90750-750 ABLH91000-1000 ABLH91200-1200
Total Travel 750 mm x 750 mm 1000 mm x 1000
mm
1200 mm x 1200
mm
Drive System Linear Brushless Servomotor
(Bridge Axis: BLM-325-A, Gantry Axis: BLMH-262-A)
Feedback Noncontact Linear Encoder (LN) or Laser Interferometer (LZR)
Resolution 1 nm - 1.0 µm
Maximum Travel Speed
(1)
500 mm/s
Maximum Linear Acceleration (no load) 1 g - 10 m/s
2
Maximum Load
(2)
125.0 kg
Accuracy
(3)
LN ±0.85 µm ±1.0 µm ±1.25 µm
LZR Contact Aerotech for further details
Repeatability
(3)
LN ±0.2 µm
Straightness and Flat-
ness
(5)
Maximum Devi-
ation ±2.0 µm ±2.5 µm ±1.5 µm
Pitch/Roll/Yaw 4.5 arc sec 5.5 arc sec 6 arc sec
Stage Mass 3200.0 kg 4130.0 kg 5200.0 kg
Moving Mass Bridge 35.0 kg
Gantry 120.0 kg 130.0 kg 140.0 kg
Orthogonality 3.5 arc sec 4 arc sec 5 arc sec
Operating Pressure
(6)
551.6 kPa + 0, -34 kPa
Air Consumption
(7)
85 SLPM
Material
(8)
Aluminum
Finish Hard Coating (62 Rockwell Hardness Teflon® Impregnated)
(1) Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system res-
olution.
(2) Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
(3) Requires Aerotech controllers and HALAR Calibration option.
(4) Requires environmental compensation.
(5) Requires HALSF option
(6) To protect air bearing against under-pressure, an in-line pressure switch tied to controller E-stop input is recommended.
(7) Air supply must be clean, dry to 0° F dewpoint and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
(8) Optional construction materials include ceramic, invar, stainless, and titanium.
(9) Specifications are for single-axis systems, measured 50 mm above the tabletop. Performance of multi-axis systems is payload
and workpoint dependent. Consult factory for multi-axis or non-standard applications.
Table 3-2: ABL/ABLH9000 Series Specifications (continued)
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