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Installation And Use Manual

entegris Wafergard III NF-750, Installation And Use Manual

The entegris Wafergard III NF-750 is a cutting-edge product designed to ensure optimal performance and protection for wafers during storage and transport. To ensure hassle-free installation and usage, please download the free "Installation And Use Manual" from our website, manualshive.com, and have all the necessary instructions at your fingertips.

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WAFERGARD® III NF-75O

IN-LINE GAS FILTERS

Installation and use manual

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Summary of Contents for Wafergard III NF-750

Page 1: ...WAFERGARD III NF 75O IN LINE GAS FILTERS Installation and use manual ...

Page 2: ...NSTALLATION AND USE MANUAL Table of Contents Introduction 2 Features and Benefits 2 Applications 2 Specifications 2 Installation 3 Step 1 Unpack the Filter 3 Step 2 Install the Filter 3 Step 3 Prepare the Filter for Use 3 Filter Replacement 3 Performance Data 4 Dimensions 4 Ordering Information 4 Warranty Information 5 ...

Page 3: ...ented sintered nickel membrane filter Housing Patent pending design electropolished VAR 316L stainless steel housing Downstream cleanliness Particles1 2 0 03 particles liter 1 particle ft3 0 01 µm 300 SLPM Volatiles3 Volatile outgassing of H2O O2 and THC is below detectable limits by RGA and FID at room temperature Removal rating 0 003 µm Surface finish interior 5 µin Ra Total flow area 140 0 cm2 ...

Page 4: ... filter on the mating connections 4 Tighten the nuts by hand then 1 8 turn past hand tight by wrench for VCR compatible fittings DO NOT overtighten NOTE Refer to specific technical guides furnished by fitting manufacturers for additional specifications Step 3 Prepare the Filter for Use 1 Verify integrity of the seal by appropriate helium leak testing procedures 2 Turn the gas flow ON then OFF 10 t...

Page 5: ...ate 23 C SLPM 0 200 400 600 800 1000 60 48 36 24 12 0 5 6 4 8 4 0 3 2 2 4 1 6 0 8 0 2 06 bar inlet 30 PSIG 6 2 bar inlet 90 PSIG 4 12 bar inlet 60 PSIG Differential Pressure bar Differential Pressure PSIG Nitrogen Flow Rate 23 C SLPM 0 200 400 600 800 1000 15 12 9 6 3 0 1 4 1 2 1 0 0 8 0 6 0 4 0 2 0 Part Number Overall Length Fitting Options WG3N S7 RR2 127 mm 5 00 1 4 Gasket seal compatible with ...

Page 6: ... the warranty period provided the customer notifies Entegris promptly of any such defect The exclusive remedy provided herein shall not be deemed to have failed of its essential purpose so long as Entegris is willing and able to repair or replace any nonconforming Entegris product or part or to refund the purchase price paid Applicable Warranty Period As used in this General Limited Warranty the t...

Page 7: ...S Patent No 36 249 2000 2007 Entegris Inc All rights reserved Printed in U S A P74590 Rev B 4502 5258ENT 1007 The materials integrity management company For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you Visit www entegris com and select Regional Customer Service Centers for the center nearest you Terms and Conditions of Sale All purc...

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