Parts Removal Replacement
3.2.2
Measurement Head (complete)
Precondition:
The cross stage covers have been removed.
Procedure:
1)
Disconnect the MH cables at main control
PCB (USB, power) and at interferometer
(PCIe) a slotted screwdriver is required.
2)
Disconnect the proximity sensor and
joystick cable at main control PCB.
3)
Remove the screw (Torx 10) connecting
the yellow grounding cable.
4)
Remove the screw (Torx 20) holding the
clamp (USB , PCIe). Cut the zip tie (side
cutters) to PCIe and open the cable holder
(slotted screwdriver).
Fig. 7 – MH, proximity and joystick cables
5)
Open the ferrite core plastic housing using
the supplied key (Torx 10).
6)
Remove the two screws (Torx 10) holding
the clamp (MH cables) between the ferrite
cores if present.
Fig. 8 – PCIe cable removal
7)
Attach right side cover with screws
(Torx 20).
8)
Push the MH cable below the metal plate
and close the ferrite core plastic housing.
9)
Using the joystick lower the measurement
head and insert a long screwdriver into
the safety hole. Then using the joystick
slowly raise the measurement head so
that the screwdriver is ‘wedged/stuck’ in
place.
Fig. 9 - MH cable plate screw removal
Joystick
Proximity
Screws
USB
Power
Clamp
Ferrite cores
MH cables
Safety hole
PCIe
Slotted screwdriver
SM-30-4060
Confidential and Proprietary
Service Manual
Version 03, 2014-10-13
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