5 First Operating Steps | 5.4 Acquiring an Image
ZEISS
5.4.4 Switching on the Gun | LaB₆ Filament
Info
If you operate the microscope with a LaB₆ filament, then you need to switch on or switch off
the gun and the EHT separately.
Prerequisite
ü
The chamber and the gun head have been evacuated.
Procedure
1. In the right part of the
Status Bar
, verify whether the gun is switched on or off.
à
If
or
is displayed, the gun is already switched on and you can skip the fol-
lowing steps.
à
If
is displayed, the gun is switched off.
2. In the
SEM Controls
panel, select the
Vacuum
tab.
3. Verify that the
EHT Vac ready
readout is
EHT Vac ready = Yes
.
If not, the correct vacuum is not achieved. Check if the
Pump
procedure has been com-
pleted.
4. In the right part of the
Status Bar
, click
.
à
The pop-up menu for vacuum, gun and EHT activation is displayed.
5. Click
Beam On
.
à
The gun runs up.
5.4.5 Switching on the EHT | LaB₆ Filament
When you switch on the EHT, the gun starts emitting electrons.
Info
If you operate the microscope with a LaB₆ filament, then you need to switch on or switch off
the gun and the EHT separately.
Prerequisite
ü
The chamber and the gun head have been evacuated.
ü
The gun has been switched on.
Procedure
1. In the SEM Controls panel, select the
Vacuum
tab.
2. Check that
Vac Status = Ready
is displayed.
3. In the SEM Controls panel, select the Gun tab.
4. Double-click the
Fil I Target
readout.
à
The
Fil I Target
window is displayed.
5. In the input field, enter the required filament current in mA and click
OK
.
INFO:
For a LaB₆ filament, you may start with a filament current of approximately
1800 mA.
6. In the SEM Controls panel, select the
Gun
tab.
7. Double-click the
EHT Target
readout.
à
The
EHT Target
window is displayed.
8. In the input field, enter the required acceleration voltage in kV and click
OK
.
9. In the right part of the
Status Bar
, click
.
à
The pop-up menu for vacuum, gun and EHT activation is displayed.
10. Click
EHT On
.
à
The EHT runs up to the set voltage.
68
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
Summary of Contents for EVO
Page 1: ...Instruction Manual ZEISS EVO Scanning Electron Microscope...
Page 179: ......