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CAUTION
There are moving parts at the specimen stage.
Fingers could be trapped.
Do not touch the specimen stage when the specimen chamber is open.
CAUTION
The specimen might have a weight of 500g.
Risk of injury when specimen falls down.
Wear personal protective equipment, i.e. protective shoes.
CAUTION
Risk of property damage
FESEM or specimen could be damaged, if specimen stage is at short working distance
when opening the chamber door.
Always move the specimen stage to a large working distance before opening the chamber
door.
CAUTION
Opening the chamber door with stage tilted.
Detectors and the motor of the stage could be damaged.
Set the tilt angle of the stage to 0° before opening the chamber door.
CAUTION
Risk of property damage
FESEM or specimen could be damaged, if a detector is in the travel of the 105-mm DC
stage.
Retract the detectors before opening the chamber door.
CAUTION
Risk of property damage due to improper maintenance, service, or repair.
The warranty might be voided.
Follow the instructions given in this instruction manual.
