Veeco Dimension 3100, Manual

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Facilities Requirements
General Facilities Guidelines
Rev. D Dimension 3100 Manual 51/(54 Blank)
3.6 General Facilities Guidelines
The following list contains general facilities recommendations for the Dimension 3100 system:
• For the VT-103-3K and VT-102 vibration isolation systems, you must provide either
clean dry air or nitrogen with a pressure capacity of 80psi in order to float the air tables.
You must provide the regulator for adjusting the pressure from the source. The source
can be either a house air system or a tank.
• Do not mount PA/Paging speakers near the AFM. If a speaker is required use a local
volume control instead.
• Keep the telephone ringer on low and install the telephone away from the AFM. Or, turn
the telephone ringer off and install a flashing light as a substitute ringer.
• Do not install fluorescent lighting with switching ballasts (also referred to as electronic
ballasts). Standard high efficiency ballasts are fine.
• Install baffling in the air ducts to reduce the hissing from the HVAC system or use non-
powered HEPA filters. This type of filtering is called Class M7 or 245,000. An in-line
fan is installed upstream to provide pressure for the HEPA filter. If installing locally
powered HEPA fans, a local on/off switch is needed to turn the fans off while images are
captured.
• Add insulation to all walls. If possible, all walls should be hard walls as opposed to
temporary walls. Installing insulation in the ceiling helps to damper the acoustic noise
from the roof.
• Temperature is standard laboratory s/- 2.5° F.
• Humidity is standard laboratory s/- 10% RH.
• Power should be in dedicated 115 volt standard duplex outlet (15 amp).
• Clean Dry Air (CDA) is required with a recommended connection of 0.25-inch poly-flow
tubing with a range of 0-100 PSI.
• Customer installed house vacuum and vacuum wand is recommended for wafer loading
and unloading.
• Customer installed nitrogen is recommended for the blow-off nozzle.