Veeco Dimension 3100, Manual

Page: 343 / 376

Calibration
Autocalibration
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9. Go to the Capture directory where all Capture Calibration files are saved.
10. Select Offline > File > Browse or click on Browse to review all Capture Calibration files.
11. Verify that all calibration images contain features spanning the full width and height of the
image frame (see the right image in Figure 17.5c ).
12. Recapture all images unsuitable for calibration. Record the file name extensions for all
unusable files (e.g., .cxy, .dyy), then delete the files.
13. Re-engage on the reference surface and select Capture Calibration .
14. Verify that the file name prefix is identical to that of the usable files. Remove the “x” from all
file name extensions (except for the unusable file names recorded in Step 12 ).
15. Finally, click on Capture to recapture the selected files.
17.6 Autocalibration
After the Capture Calibration routine is completed, the user measures surface features contained
within each image and enters their dimensions into the software. The software compares its
estimates with the actual (user-entered) dimensions to make final corrections. This portion of
calibration is carried out using the
Offline > Utility > Autocalibration command.
To utilize the Offline > Utility > Autocalibration command, do the following:
1. Select one of the desired captured calibration images in the Capture directory.
2. Select the Offline > Utility > Autocalibration command. The control monitor will display
the X-Y Piezo Calibration dialog box (see Figure 17.6a ).
Figure 17.6a X-Y Piezo Calibration Prompt
3. Verify that the file name prefix assigned to the captured files from the Capture Calibration
routine is correct.
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