Series 65
INSTALLATION
963283EA
Edition 2019-05-03
91/129
4.12.2
Inquiry commands (PM-V2 compatible)
<CR>...Carriage Return (0D hexadecimal); <LF>...Linefeed (0A hexadecimal)
Description
Commands
Acknowledgements
Examples / Explanation
Actual valve position
in 1/1000 of stroke
(0 = closed, 1000 =
open)
A:
A:xxxxxx
A:000428
= 428 * 1/1000 of stroke
Actual pressure
in units of
1/communication range
of sensor 1 full scale
P:
P:xxxxxx
P:000119
= 119 / communication range * sensor 1 full
scale pressure
P:-00004
= -4 / communication range * sensor 1 full
scale pressure
Actual pressure (xxxxxx)
Pressure of sensor 1
(yyyyyy)
Pressure of sensor 2
(zzzzzz)
X:
X:xxxxxxyyyyyyzzzzzz
sensor 1 = 250mTorr, sensor 2 = 10Torr
communication range = 100000
pressure = 119.0mTorr
X:001190001190001190
pressure = 1320mTorr
X:013200002500013200
ranges:
xxxxxx = - 00350 to 100000
yyyyyy = - 00350 to 002500
zzzzzz = -14000 to 100000
Pressure setpoint
in units of
1/communication range
of sensor 1 full scale
W:
W:xxxxxx
W:000119
= 119 / communication range * sensor full
scale pressure
Read remote / local
status
I:
I:REMOTE
I: LOCAL
= remote mode
= local mode
Read control mode
M:
M: POS
M: PRESS
= position mode
= pressure mode
Self test
T:
T: OK
T:PAR-ER
T:ROM-ER
= memory o.k.
= parameter error
= EPROM error
(see section «Trouble shooting» if
«PAR-ER» or «ROM-ER» appears)
Read valve cycle
counter
c:
c:xxxxxxxxxx
c:0000125013
= 125’013 cycles
Reset valve cycle
counter
n:
n:
= set counter to zero
