VAT 653 Series Installation, Operating, & Maintenance Instructions Download Page 67

Page: 67 / 129

Series 65

INSTALLATION

963283EA

Edition 2019-05-03

67/129

Required information for support:

•

Go to ‘Tools / Create Diagnostic File’ in ‘Control Performance Analyzer’ and save file

•

Pressure / flow / gas conditions to be controlled

•

Chamber volume

•

Pumping speed (l/s) and pump type (e.g. turbo pump)

•

System description

•

Problem description

Send diagnostic file with and all required information to [email protected]

Summary of Contents for 653 Series

Page 1: ...250 mm I D 4 10 This manual is valid for the valve ordering number s 653 GH 2 sensor inputs analog outputs 653 AH 2 sensor inputs analog outputs 15V SPS 653 HH 2 sensor inputs analog outputs PFO 653...

Page 2: ...duplicated or distributed without written permission from VAT Offenders are liable to pay damages The original VAT firmware and updated state of the art versions of the VAT firmware are intended for u...

Page 3: ...22 4 2 4 Tightening torque 23 4 2 5 Mounting with centering rings 23 4 2 6 Mounting with O ring in grooves 24 4 2 7 Admissible forces 25 4 2 8 Requirements to sensor connection 25 4 3 Electrical conne...

Page 4: ...97 5 3 Open valve 97 5 4 Position control 97 5 5 Pressure control 97 5 6 Display information 98 5 6 1 Power up 98 5 6 2 Operation 99 5 6 3 Error 99 5 6 4 Safety mode 99 5 7 Operation during power up 1...

Page 5: ...Series 65 963283EA Edition 2019 05 03 5 129 12 Spare parts 124 12 1 Drawing 124 12 1 1 Valve unit with seals and grease 125 12 1 2 Control and actuating unit 126 12 1 3 Accessories 127 13 Appendix 128...

Page 6: ...se product for clean and dry vacuum applications only Other applications are only allowed with the written permission of VAT 1 3 Used abbreviations Abbreviation Description CPA Control Performance Ana...

Page 7: ...VDC 5 1200 mA max connector POWER connector SENSOR Sensor power supply 2 653 G 653 H Input Output 24 VDC resp 15 VDC same as input but 2 0 A max at 15 VDC 1 5 A max at 24 VDC connector POWER connecto...

Page 8: ...d valve closed adjustable with CPA 4 0 valve opened adjustable with CPA 4 0 connector POWER max 70 V 0 1 A connector POWER Digital inputs 4 voltage control contact control 5 24V 2 10 mA 3 3V 2 mA conn...

Page 9: ...typ 0 45 s typ 0 9 s typ 0 5 s typ 0 9 s typ 0 5 s typ Opening time throttling only full stroke 0 7 s typ 0 4 s typ 0 8 s typ 0 45 s typ 0 9 s typ 0 5 s typ 0 9 s typ 0 5 s typ Closing time throttlin...

Page 10: ...ycles open closed open Throttling cycles open max throttle open 200 000 unheated and under clean conditions 1 000 000 unheated and under clean conditions Admissible operating temperature 10 C to 120 C...

Page 11: ...50 10 65348 Max differential pressure on plate during isolation 1200 mbar in either direction 1200 mbar in either direction 1200 mbar in either direction 1200 mbar in either direction Max differential...

Page 12: ...ion Operating Maintenance Instructions are an integral part of a comprehensive documentation belonging to a complete technical system They must be stored together with the other documentation and acce...

Page 13: ...ions WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out the described work 2 4 Safety labels Label Part...

Page 14: ...283EA 3 Design and Function 3 1 Design 1 Plate seal 7 Rotary feed through seals 2 Body seal 8 Pendulum plate 3 Shaft feed through seals 9 Sealing ring 4 Bonnet seal 10 Bonnet 5 Actuator 11 Body 6 Inte...

Page 15: ...stepper motor An encoder monitors the position This principle ensures fast and accurate process pressure control For opening or control the sealing ring is lifted pneumatically by compressed air afte...

Page 16: ...nces Example Downstream control 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable 6 Controller and actuator 7 Cable to remote control unit 8 Cable to power supply 9 HV Pump Seff...

Page 17: ...into which gas is admitted at the same time the pressure can be controlled in two ways 1 Downstream control standard The pressure is controlled by changing the conductance of a control valve between...

Page 18: ...sical overstraining Use a crane to lift valves DN 200 8 and larger Make sure that the supplied products are in accordance with your order Inspect the quality of the supplied products visually If it do...

Page 19: ...not be touched NOTICE Sealing surfaces Sealing surfaces of valve and vacuum system could be damage in case of incorrect handling Only qualified personal are allowed to install the valve into the vacuu...

Page 20: ...Edition 2019 05 03 963283EA Mount valve to a clean system only 4 2 1 Installation space condition Install the valve with integrated controller with space for dismantling and air circulation as shown...

Page 21: ...19 05 03 21 129 4 2 2 Connection overview System 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable s 6 Controller and actuator 7 Cable to remote control unit 8 Cable to power su...

Page 22: ...ect wiring 8 This valve has a double sealed rotary feedthrough and optionally an intermediate pumping port for the actuator shaft This port 1 8 ISO NPT could be connected to the vacuum line see Figure...

Page 23: ...ved surface quality surface treatment and lubrication The torques below are valid if immersion depth of the mounting screws is at least once the thread diameter min 1d and the friction coefficient of...

Page 24: ...bs ft DN100 4 65340 20 23 35 40 35 40 15 17 26 30 26 30 DN160 6 65344 35 40 35 40 35 40 26 30 26 30 26 30 DN200 8 65346 35 40 35 40 80 90 26 30 26 30 59 67 DN250 10 65348 35 41 65 70 80 90 26 30 48 52...

Page 25: ...s is min 1 x thread diameter Please contact VAT for more information 4 2 8 Requirements to sensor connection To achieve fast and accurate pressure control a fast sensor response is required Sensor res...

Page 26: ...or power supply Connect all cables exactly as shown in the following descriptions and schematics NOTICE Burned connector pins spark Connector pins or electronic parts could damage if plugged and unpl...

Page 27: ...ion plates of ground strap must be total plane for a good electrical contact The connection point at chassis FE must be blank metal not coated It is also possible to connect the ground strap at system...

Page 28: ...g External 15 VDC supplied to POWER connector is feedthrough to SENSOR connector to supply 15 VDC sensors Refer to chapter Power and sensor connection 15 VDC sensors without optional SPS module for sc...

Page 29: ...ay from noise sources Connect Power supply 24 GND at DA 15 male power connector and Sensors 24V 0V at DA 15 female sensor connector exactly as shown in the drawing above Connector Use only screws with...

Page 30: ...ay from noise sources Connect Power supply 24 GND at DA 15 male power connector and Sensors 0V at DA 15 female sensor connector exactly as shown in the drawing above Connector Use only screws with 4 4...

Page 31: ...away from noise sources Connect Power supply 24 GND and GND 15V 15V at DA 15 male power connector and Sensors 15V 15V 0V at DA 15 female sensor connector exactly as shown in the drawing above Connecto...

Page 32: ...ocate it away from noise sources Connect Power supply 24 GND at DA 15 male power connector and Sensors 0V at DA 15 female sensor connector exactly as shown in the drawing above Connector Use only scre...

Page 33: ...ay from noise sources Connect Power supply 24 GND at DA 15 male power connector and Sensors 15V 15V 0V at DA 15 female sensor connector exactly as shown in the drawing above Connector Use only screws...

Page 34: ...and 2 digital outputs Digital inputs may be operated either by switches or by voltage sources Digital inputs on the POWER and INTERFACE connector have the same priority Active digital inputs have high...

Page 35: ...INSTALLATION 963283EA Edition 2019 05 03 35 129 4 3 3 2 Power connector Configuration with voltage source for digital inputs Interlock 4 3 3 3 Interface Connector Configuration with switches for digit...

Page 36: ...INSTALLATION Series 65 36 129 Edition 2019 05 03 963283EA 4 3 3 4 Interface Connector Configuration with voltage source for digital inputs...

Page 37: ...l command have been received The function is activated when optocoupler is on in non inverted configuration The function is activated when optocoupler is off in inverted configuration Configuration ca...

Page 38: ...UND Digital common Common for all digital output Connect or terminal of source with common 4 3 3 7 Analogue output Pin Function Signal type Description 22 PRESSURE Analog output This output indicates...

Page 39: ...e DB 25 connector 4 3 5 Service port connection The service port connector SERVICE USB B allows to connect the valve to a USB A port of a computer This requires a USB A B cable male male The Service p...

Page 40: ...Interface configuration Refer to chapter RS232 interface configuration for details 5 Sensor configuration Basic configurations of the valve must be adapted according to application needs Refer to chap...

Page 41: ...rget Position Actual Position The pressure scaler defines the unit range of all pressure values Target Pressure Actual Pressure Overall there are six individual scalers RS232 Position Scaler Pressure...

Page 42: ...en the valve performs the homing procedure Standard Do homing after restart if valve is not in sealed state Open Command Do homing on an open command Move Command Do homing on any move command At Star...

Page 43: ...sensor connection to get more information about the pinning Each of the four IO 2 inputs and 2 outputs has following parameters Parameter Description Enable True enables the input or output State Cur...

Page 44: ...alve has to know what sensors are connected Parameter Description Available Set to True if a sensor is connected Enable Set to True if the sensor signal is used for pressure control Range Data Unit Se...

Page 45: ...al Pressure In other case the high range sensor is used During position control Soft Switch is used Threshold High SFS low sensor Threshold Low SFS low sensor Defines the crossover area in Crossover M...

Page 46: ...r 1 Range Scale Linear Sensor 1 Input Source Analog Sensor 2 Available 1 Sensor 2 Enable 1 Sensor 2 Range Data Unit mTorr Sensor 2 Range Upper Limit Data Value 100 0 Sensor 2 Range Lower Limit Data Va...

Page 47: ...n be read on parameter Sensor x Offset Value SFS Clear the offset values by setting Execute to 2 The result of clearing the zero adjust Sensor x Offset Value SFS 0 0 Sensor 1 Enable Sensor 2 Enable 0...

Page 48: ...anymore Do not perform Zero Adjust as long as pressure gauge voltage is shifting otherwise incorrect pressure reading is the result Refer to manual of sensor manufacturer for warm up time 2 In OUTPUT...

Page 49: ...sor 1 0 means the whole pressure range of the sensors Open Speed Define the speed for opening the valve during the learn procedure 1 0 means full speed Status State of the current learn 0 Not Started...

Page 50: ...m3 s pWP pressure of working point Pa CWP required conductance of working point l s qWP gasflow of working point mbar l s pWP pressure of working point mbar CWP required conductance of working point...

Page 51: ...ts But if the result of the pressure control does not meet the expectations the different controller units can be an option for optimization With the four controller units it s possible to use an own...

Page 52: ...e sensor is phased out while high range sensor is phased in during pressure rise During pressure decrease the high range sensor is phased out while low range sensor is phased in This maintains a funct...

Page 53: ...control algorithm a special procedure called learn must be executed first see chapter x The valve will observe the behavior of the vacuum system by moving the valve to different positions During the l...

Page 54: ...problems can be reduced But control response time will be slowed down by this measure Learn Data Selection There are up to 4 different learn data sets available Select which Learn Data set the adaptiv...

Page 55: ...ize over undershoot of pressure 5 10 15 20 25 0 5 10 15 pressure time New Target Pressure without pressure ramp Actual Pressure Target Pressure Target Pressure Used ramp 5 10 15 20 25 0 5 10 15 pressu...

Page 56: ...parameter value Ramp Time Ramp Time is a value in the unit seconds After setting a new Target Pressure Target Pressure Used will converge the Target Pressure in the slope defines in parameter Ramp Slo...

Page 57: ...vailable Tv 500 sec Tv 500 sec Adaptive pressure controller Fixed pressure controller Fixed pressure controller Soft Pump Soft Pump Use the formula below to define the applicable pressure control algo...

Page 58: ...ance with fixed PI pressure controller Tuning of control pressure performance with Soft pump refer to chapter Tuning of control performance with soft pump pressure controller 4 10 4 1 Tuning of contro...

Page 59: ...or connection Sensor delay adjustment Sensor delay adjustment effects Stability Adjustment range is from 0 to 1 0s Pipes and orifices for sensor attachment delay response time and so badly impact pres...

Page 60: ...rol a lower pressure 4 Repeat from step 2 with longer setpoint ramps until best response is achieved 5 Verify pressure control response for a setpoint raise situation In case a long ramp time is requi...

Page 61: ...ation 4 Repeat from step 2 with slower valve speed until required response is achieved Required information for support Go to Tools Create Diagnostic File in Control Performance Analyzer and save file...

Page 62: ...tion A PI controller delivers the best results for a certain working point pressure gas flow If there is only one working point this pressure and gas flow has to be used for optimizing P and I gain If...

Page 63: ...Series 65 INSTALLATION 963283EA Edition 2019 05 03 63 129 Example...

Page 64: ...n results in a slow asymptotical pressure rise and there is still a constant deviation to SP2 the I gain is too low The optimal value for I gain is found if the transition from SP2 to SP1 result in ju...

Page 65: ...ated for PI controller mode When switching to pump down control mode the P gain value evaluated for the PI controller has to be send to the valve controller When switching back into PI controller mode...

Page 66: ...ressure set point is 510 Torr At each new interval exceeding 10 sec send the new pressure set point Repeat until process pressure is achieved While pumping down chamber pressure and valve position sho...

Page 67: ...ols Create Diagnostic File in Control Performance Analyzer and save file Pressure flow gas conditions to be controlled Chamber volume Pumping speed l s and pump type e g turbo pump System description...

Page 68: ...ITION CONTROL PRESSURE CONTROL OPEN VALVE or CLOSE VALVE command POSITION CONTROL Set R aaaaaa R Get i 38 i 38aaaaaaaa data length for Set 6 characters for Get 8 characters aaaaaa position SETPOINT va...

Page 69: ...i 60 i 60aaaaaaaa data length 8 characters aaaaaaaa sensor 1 offset 140000 0140000 1 4V 1 4V This function returns the sensor 1 offset voltage adjusted by ZERO SENSOR 2 OFFSET Get i 61 i 61aaaaaaaa da...

Page 70: ...nput 9 INTERLOCK CLOSED by digital input C power failure D safety mode E error read ERROR STATUS for details c Power Failure Option 0 disabled 1 enabled d Warning 0 no warnings 1 warnings read WARNING...

Page 71: ...sure raising 0 Ok 1 pressure not raising during LEARN gasflow missing g Pressure stability 0 OK 1 sensor unstable during LEARN h Reserved do not use This function checks the status of LEARN and indica...

Page 72: ...eserved do not use This function returns warning information about the valve If a warning is present countermeasure should be taken Use RESET command to delete service request bit Remark Without LEARN...

Page 73: ...arning present read WARNINGS and ERROR STATUS for details This function returns an assembly consisting of POSITION PRESSURE and main status information for the valve HARDWARE CONFIGURATION Get i 80 i...

Page 74: ...CCESS MODE Set c 01aa c 01 data length 2 characters aa 00 local operation service port 01 remote operation change to local enabled 02 locked remote operation change to local not possible via service p...

Page 75: ...failure end position 0 valve will close 1 valve will open 2 valve stay on actual position f Slave offline position 0 valve will close 1 valve will open 2 valve stay on actual position g Synchronizatio...

Page 76: ...3 for pressure control with low range sensor and read high range sensor from SENSOR 2 READING resp SENSOR 1 READING b 1 ZERO enabled 0 ZERO disabled cdefgh High range Low range sensor full scale ratio...

Page 77: ...SOR 1 LINEARIZATION Set s 17aaaabbbb s 17 Get i 17 i 17aaaabbbb data length 8 characters a logarithmic resolution millivolt decade 0000 linearizing off 0001 min value 9999 max value default value 0000...

Page 78: ...omes linear full scale 1000000 Pressure control algorithm adaptive downstream needs a linear sensor signal therefore a logarithmic signal must be linearized Example s 1700000000 Linear sensor Example...

Page 79: ...000000 e g 0010000 pressure range 0 10 000 This function defines the communication range between the valve and the host computer for POSITION PRESSURE and SENSOR READING Remark In case ZERO has been p...

Page 80: ...op bits 0 1 1 2 e 0 IC 8 PM V2 f digital input OPEN VALVE 0 not inverted 1 inverted 2 disabled g digital input CLOSE VALVE 0 not inverted 1 inverted 2 disabled h 0 reserved do not change This function...

Page 81: ...for details This command starts LEARN By OPEN VALVE CLOSE VALVE or POSITION CONTROL commands the routine may be interrupted Remark Without LEARN the PID adaptivecontroller is not able to perform press...

Page 82: ...rk Refer to Valve speed adjustment for details RESET Set c 82aa c 82 data length 2 characters aa 00 reset service request bit from WARNINGS 01 reset FATAL ERROR restart control unit This function rese...

Page 83: ...controller bb Parameter number see table below c Parameter value depends on parameter number a floating point type or a integral type value max length 20 characters floating point type format x y or...

Page 84: ...00 Default is 0 00 s Get i 02A00 i 02A00c RAMP TIME Set s 02A01c s 02 FLOAT c 0 00 1 000 000 0 Default is 0 00 s Get i 02A01 i 02A01c RAMP MODE Set s 02A02c s 02 UINT c 0 or 1 0 constant time 1 const...

Page 85: ...time slope is SFS 10V in 10 Seconds In the adaptive pressure controller mode the RAMP TIME parameter also can be a value to minimize over undershooting The ramp could be used to harmonize the adaptiv...

Page 86: ...tant Time The RAMP TIME is dependent on the adjusted parameter ramp time and is always the same independent of the control deviation That means the ramp time from the actual value to the setpoint valu...

Page 87: ...Command Request Data Type Values RAMP TIME Pressure setpoint ramp time s Set s 02C01c s 02 FLOAT c 0 00 1 000 000 0 Default is 0 00 Get i 02C01 i 02C01c RAMP MODE Set s 02C02c s 02 UINT c 0 or 1 0 con...

Page 88: ...Constant Time The RAMP TIME is dependent on the adjusted parameter ramp time and is always the same independent of the control deviation That means the ramp time from the actual value to the setpoint...

Page 89: ...sing E 000011 Invalid number of characters between and E 000012 Invalid value E 000023 Value out of range E 000030 Hardware Pressure mode Zero or Learn without Sensor E 000040 Command not applicable f...

Page 90: ...or full scale communication range set to 100000 Pressure setpoint Xxxxxx setpoint value 0 communication range C R S xxxxxx S no 2nd answer S 000119 119 C R F S setpoint Hold mode Freeze valve position...

Page 91: ...of sensor 2 zzzzzz X X xxxxxxyyyyyyzzzzzz sensor 1 250mTorr sensor 2 10Torr communication range 100000 pressure 119 0mTorr X 001190001190001190 pressure 1320mTorr X 013200002500013200 ranges xxxxxx 0...

Page 92: ...offset 13 1000 sensor 1 full scale pressure Read offset of sensor 2 i 07 i 07xxxxxx i 07 00009 offset 9 1000 sensor 2 full scale pressure Position air error p p ____OK p POS ER p AIR ER position o k...

Page 93: ...t be used alone with integrated controller c Sensor 2 Full Scale Range Torr or mbar 0 0 0 010 1 0 0 020 2 0 0 025 3 0 0 050 4 0 0 100 5 0 0 200 6 0 0 250 7 0 0 500 8 0 1 0 9 0 2 0 A 0 2 5 B 0 5 0 C 0...

Page 94: ...arger 1000 E 000007 PRESSURE MODE ZERO or LEARN have been selected with no sensor connected display format set for no sensor E 000008 Controller is not in correct mode for the given command e g L XXXX...

Page 95: ...lete into the system 5 1 Normal operation This valve is designed for downstream pressure control in vacuum chambers It can be employed in a pressure control mode or a position control mode In both cas...

Page 96: ...and maintenance How to start 1 Connect service cable USB A B cable male male between PC and valve A drive opens 2 Double Click on CPA4 exe to open the Control Performance Analyzer 3 Click Local for L...

Page 97: ...SETPOINT for details Select or enter position setpoint 1 In OUTPUT Buffer POSITION SETPOINT 2 Select a valid value 3 In OUTPUT Buffer CONTROL MODE SETPOINT 4 Select Position value 2 5 5 Pressure cont...

Page 98: ...s are illuminated 2st information for about 3s Valve type e g 6 7 0 3st information for about 3s Firmware generation and Firmware Type e g 01 0C 0 1 0 C 4st information for about 3s Firmware version a...

Page 99: ...escription Digit 1 Digit 2 Digit 3 Digit 4 Error number xyz E x y z alternately if error code exist Error code u v w For Error number code Refer to Trouble shooting for details 5 6 4 Safety mode By me...

Page 100: ...onductance All other than closed not isolated Valve runs to max throttle position to detect limit stop for homing Display shows configuration of product resp Ho until homing is done and afterwards to...

Page 101: ...ve and system await until the valve is cooled down complete before doing any work This valve may be operated in the temperature range mentioned in chapter Technical data 5 10 Behavior In case of compr...

Page 102: ...u v w 1 No valve connected Connect valve controller to the valve 2 Non volatile memory failure Replace valve controller 3 Analog digital converter of sensor input failure Replace valve controller 4 I...

Page 103: ...tion controller failure in master slave communication Contact vat support 4 0 Compressed air error Check compressed air 4 2 Power supply low voltage detected Check if power supply is ok and is able to...

Page 104: ...ve and system await until the valve is cooled down complete before doing any work NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room glo...

Page 105: ...seals gate and body seal of sealing ring 12 month but max 200 000 cycles 6 months but max 200 000 cycles 3 months but max 200 000 cycles actuator shaft seals 1 000 000 cycles 6 months 3 months 1 Thos...

Page 106: ...equired tool Electrical power and compressed air is required to perform steps 1 to 11 during disassembly respectively 11 to 1 during assembly 1 Set the valve to local mode 2 Activate Maintenance reduc...

Page 107: ...handle 9 Release MAINTENANCE BUTTON 10 Remove sealing ring 11 To prevent the shaft and retaining pins from moving during work switch the valve to safety mode Refer to Safety mode for details Retaining...

Page 108: ...g ring 18 Deposit vacuum grease on the bottom side of the body seal according to drawing below Pay attention that the quantity of vacuum grease listed in the table to the right is distributed constant...

Page 109: ...iption Required tool Electrical power and compressed air is required to perform steps 1 to 11 during disassembly respectively 11 to 1 during assembly 1 Set the valve to local mode 2 Activate Maintenan...

Page 110: ...hand unlock the sealing ring by pressing the handle 9 Release MAINTENANCE BUTTON 10 Remove sealing ring 11 To prevent the shaft and retaining pins from moving during work switch the valve to safety m...

Page 111: ...t 24VDC power Wait for 60s then disconnect cables and compressed air from valve actuator 16 Unfasten all 2 controller screws and lift controller carefully from actuator Allen Wrench 4 mm 17 Unfasten a...

Page 112: ...seals if necessary Lubricate each o ring with 0 05 ml vacuum grease 23 Install o rings 24 Deposit 0 1 ml vacuum grease on each o ring Pay attention that grease is distributed constantly over the whol...

Page 113: ...in reverse order as they had been disassembled steps 11 to 2 open end wrench 13mm 32 Clean the valve sealing surface Lint and dust free towel a little soaked with isopropyl alcohol 33 Clean the valve...

Page 114: ...s under power The option board may or may not be equipped in your valve depending on the order Refer to page 1 of this manual to check valve version This board includes the optional modules for the va...

Page 115: ...lower than 150 C the corresponding life time curve will be somewhere in between the upper and the lower curve Therefore please determine the equivalent maintenance period for replacing the Ultra Cap...

Page 116: ...on control and actuating unit with panel removed All boards have a fixed position into control and actuating unit It is not possible to fit a board in other position as shown in picture above Do not t...

Page 117: ...crews and lift controller carefully from actuator Allen Wrench 4 mm 3 Place Option board from behind in the controller 4 Tighten option board with the 2 screws with 1 1Nm 5 Pozidriv screw driver size...

Page 118: ...pairs may only be carried out by the VAT service staff In exceptional cases the customer is allowed to carry out the repairs but only with the prior consent of VAT Please contact one of our service ce...

Page 119: ...work 9 1 Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room gloves when handling the valve NOTICE Valve in open position Va...

Page 120: ...e humidity between 10 and 70 temperature between 10 C and 50 C non condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use...

Page 121: ...ing products to VAT please fill out the VAT form Declaration of Chemical Contamination of Vacuum Valves and Components and send it to VAT in advance The form can be downloaded from our website www vat...

Page 122: ...EA 10 2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use the original packaging material and handle product with care VAT disclai...

Page 123: ...AL 963283EA Edition 2019 05 03 123 129 11 Disposal WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out th...

Page 124: ...spare parts are supplied VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff The following table s contain spar...

Page 125: ...cs required per valve 927458 5 Sealing ring shaft seals Viton N 5111 112 12 pcs required per valve N 5111 112 12 pcs required per valve N 5111 112 16 pcs required per valve N 5111 112 16 pcs required...

Page 126: ...tuator option All Item refer to chapter Drawing 12 1 2 Control and actuating unit Description Part number Control and actuating unit Too many to list Please contact VAT Option board with SPS module 15...

Page 127: ...with D Sub9 connector 735567 D Sub15 to D Sub9 Service cable PC to valve Service connector 809474 USB A B male male 12 1 3 1 Centering ring with Viton o ring Description Valve size Product ordering nu...

Page 128: ...APPENDIX Series 65 128 129 Edition 2019 05 03 963283EA 13 Appendix No information entered on time...

Page 129: ...Series 65 963283EA Edition 2019 05 03 129 129 This page left blank intentionally...

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