INSTALLATION
Series 642
54/113
Edition 2017-11-24
605593EC
3. Optimizing I gain
While optimizing I gain, the gas flow determined above has to be constant all the time.
Start with P gain set to half of the value found when optimizing P gain and set I gain to 1.0.
Keep the P gain constant.
Set chamber pressure to SP2, wait until the pressure is stable. Set pressure to SP1. If the transition from
SP2 to SP1 results in a significant pressure over shoot or if the valve position does not stabilize, I gain is
to high. If the transition results in a slow asymptotical pressure rise and there is still a constant deviation
to SP2, the I gain is too low.
The optimal value for I gain is found if the transition from SP2 to SP1 result in just a slight pressure over
shoot, a stable valve position and the actual pressure matches SP2 exactly.
Example:
Check control performance over the whole control range with parameters above.
4.7.2.1
Required information for support (in case of unsuccessful tuning procedure):
•
Go to ‘Tools / Create Diagnostic File’ in ‘Control View’ resp. ‘Control Performance Analyzer’ and save
file
•
Pressure / flow / gas conditions to be controlled
•
Chamber volume
•
Pumping speed (l/s) and pump type (e.g. turbo pump)
•
System description
•
Problem description
Send diagnostic file with and all required information to [email protected]
