Series 616
DESCRIPTION OF PRODUCT
893179ED.DOCX
Edition 2020-01-22
7/56
1.6.2
Valve unit
Description
Pressure range (unheated on delivery)
•
Stainless steel
•
Aluminum, hard anodized
1 × 10E-8 mbar to 1.2 bar (abs)
1 × 10E-6 mbar to 1.2 bar (abs)
Leak rate valve seat (unheated on delivery)
•
Stainless steel
•
Aluminum, hard anodized
1 × 10E-9 mbar ls-1
1 × 10E-4 mbar ls-1
Leak rate valve body (unheated on delivery)
•
Stainless steel
•
Aluminum, hard anodized
1 × 10E-9 mbar ls-1
1 × 10E-5 mbar ls-1
Cycles until first service:
•
Isolation cycles (open – closed – open)
250’000 (Viton
®
seals, under clean and unheated cond.)
•
Throttling cycles (open - max. throttle - open)
2’000’000 (Viton
®
seals, under clean and unheated cond.)
Admissible operating temperature
•
Valve body
•
Ambient
+10°C to +120°C
10°C to 50°C
Mounting position
Valve seat must face chamber side.
Wetted materials
•
Body, plate (616 . . - . H. . - . . . . )
Aluminum 3.2315 (AA6082) hard anodized
•
Body, plate (616 . . - . E. . - . . . . )
Stainless steel 316L (1.4404 or 1.4435)
•
Shaft
Stainless steel 316L (1.4404 or 1.4435)
•
Plate screws
Stainless steel 316L (A4)
•
Shaft seal (rotary feedthrough)
•
Plate seal
Viton
®
Viton
®
•
Slide bearing for shaft
iglidur
®
X
Max. differential pressure on plate during isolation
and opening and throttling
1000 mbar
DN (nominal I. D.) [mm]
[inch]
40
1½
50
2
Min. controllable conductance
[N
2
molecular flow]
0.05 l/s
0.1 l/s
Conductance in open position
[N
2
molecular flow]
60 l/s
120 l/s
Weight about
•
Stainless steel [kg]
•
Aluminum hard anodized [kg]
3.3 kg
2.4 kg
3.6 kg
2.7 kg
Dimensions
Refer to dimensional drawing of specific valve ordering
number (available on request)
