Series 616
DESIGN AND FUNCTION
893179ED.DOCX
Edition 2020-01-22
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3.2
Function
The valve plate acts as a throttling element and varies the conductance of the valve opening. The
integrated controller calculates the required plate position to achieve the setpoint pressure. Actuation
is performed by a stepper motor. An encoder monitors the position. This principle ensures fast and
accurate process pressure control even in demanding contaminating processes. The seal which is
attached to the plate reduces the minimum controllable conductance and allows leak tight closing of
the valve. In closed position, the seal is pressed on the body.
Open
Closed
Position control
