Varian sentorr, Instruction Manual, Page: 33 / 36

Appendix
A-2
Relative Ionization Gauge
Substance Formula Gas Correction Factor
Acetaldehyde C
2
H
4
O 2.6
Acetone (CH
3
)
2
CO 3.6
4.0
3.6
Acetylene C
2
H
2
1.9
2.0
Air 1.0
0.98
Ammonia NH
3
1.3
1.2
1.3
Amylene:
ISO
·
ISO
·
C
5
H
10
5.9
cyclo
·
CY
·
C
5
H
10
5.8
Argon Ar 1.3
1.1
1.2
0.9
Benzene C
6
H
6
5.9
5.8
5.7
5.9
6.0
Benzoic Acid C
6
H
5
COOH 5.5
Bromine Br 3.8
Bromomethane CH
3
Br 3.7
Butane:
n
·
n
·
C
4
H
10
4.9
4.7
ISO
·
ISO
·
C
4
H
10
4.6
4.9
Cadmium Cd 2.3
3.4
Carbon Dioxide CO
2
1.4
1.4
1.5
1.5
1.4
Relative Ionization Gauge
Substance Formula Gas Correction Factor
Carbon Disulfide CS
2
5.0
4.7
4.8
Carbon Monoxide CO 1.05
1.05
1.1
Carbon Tetrachloride CCI
4
6.0
6.3
Cesium Cs 4.3
2.0
4.8
Chlorine CI
2
0.68
2.6
1.6
Chlorobenzene C
6
H
5
Cl 7.0
Chloroethane C
2
H
5
Cl 4.0
Chloroform CHCl
3
4.7
4.8
4.8
Chloromethane CH
3
Cl 2.6
3.2
3.1
Cyanogen (CN)
2
2.8
3.6
2.7
Cyclohexylene C
6
H
12
7.9
6.4
Deuterium D
2
0.35
0.38
Dichlorodifloromethane CCI
2
F
2
2.7
4.1
Dichloromethane CH
2
Cl
2
3.7
Dinitrobenzene C
6
H
4
(NO
2
)
2
o
·
7.8
m
·
7.8
p
·
7.6
Ethane C
2
H
6
2.6
2.8
2.5
Ethanol C
2
H
5
OH 3.6
2.9
Ethyl Acetate CH
3
COOC
2
H
5
5.0
Gas Correction Factor Table