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41 87-900-905-01 (

I

)

  

  

        

           

 

 

 

 

    

 Varian

    

   

 Varian 

        

          

 

 

  

            

             

    

Turbo-V 

 !!!

ICE

 

 

   

 

   

"

  

 

 

 

 

 

    

         

Turbo-V 

 !!!

ICE

#      

 

 

$

 

 

            

           

 

  

      

    

Turbo-V 

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ICE. 

        

 

 & 

        

 

 

    '    

 #      

        $  

      

(heater jacket), 

           

     #

purge valve).

(          

 

 

 

         

 

)  

     

"Technical

Information"

   

       

   

VXPEDYVHLd

VXPEDYVHLd

!

          

             

               

        

35262&+

35262&+

          

              

        

 

6+0(,:6+

6+0(,:6+

2L VKPHLZYVHLd SHULHYFRXQ VKPDQWLNHYd SOKURIRULYHd SRX

HYFRXQ DSRVSDVWHLY DSRY WR NHLYPHQR

$324+.(86+

$324+.(86+

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      +

 

 

: -20 °C

+

,!

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0 - 95% 

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85/399 

   

 

6XVNHXDVLYD WZQ UXTPLVWZYQ

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 Varian

   

    +

 

   010'022,

220 Vac

 

   010'032,

120 Vac

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.,1'8126

.,1'8126

Summary of Contents for 969-9447

Page 1: ...RUCCIONES MANUAL DE ISTRU ES BEDRIJFSHANDLEIDING ISTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEK SIKIRJA FELHASZN L I K ZIK NYV PODRECZNIK INSTRUKCJI N VOD K POU IT N VOD NA OBSLUHU PRIRO NIK...

Page 2: ...Turbo V 1000 ICE Controller...

Page 3: ...ODILA ZA UPORABO 61 INSTRUCTIONS FOR USE 65 TECHNICAL INFORMATION 69 TURBO V 1000 ICE CONTROLLER DESCRIPTION 69 CONTROLLER SPECIFICATIONS 70 CONTROLLER OUTLINE 71 FUSE HOLDER AND VOLTAGE CHANGER ASSEM...

Page 4: ...cription 76 Trasmission Channel Characteristics 76 Message Structure 76 Window Based Protocol 79 USE 80 General 80 Startup 80 Front Remote Serial Selection 81 Starting the Pump 86 Monitor Relay Progra...

Page 5: ...quelli per la gestione della valvola di pulizia purge valve Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante L utilizzo dell appa...

Page 6: ...ne ed all apparato nel caso in cui la pompa sia appoggiata su di un tavolo assicurarsi che sia stabile Non fare funzionare mai la pompa se la flangia di ingresso non collegata al sistema o non chiusa...

Page 7: ...cedere alla sua eliminazione nel rispetto delle normative nazionali specifiche MESSAGGI DI ERRORE In alcuni casi di guasto la circuiteria di autodiagnosi del controller presenta alcuni messaggi di err...

Page 8: ...eratura del trasformatore del controller ha superato i 90 C Attendere che la temperatura ritorni al di sotto della soglia Premere due volte il pulsante START per riavviare la pompa FAULT TOO HIGH LOAD...

Page 9: ...schnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information ent...

Page 10: ...chlossenen Pumpe durchlesen Steht die Pumpe auf einem Tisch mu auf den stabilen Stand geachtet werden da sonst die Gefahr von Personen und Ger tesch den besteht Die Pumpe nie einschalten wenn der Eing...

Page 11: ...schl gigen landes blichen Vorschriften erfolgen FEHLERMELDUNGEN In einigen St rungsf llen zeigt das Selbstdiagnosessystem des Controllers die in der nachstehenden Tabelle zusammengefa ten Meldungen an...

Page 12: ...r des Controller Trafos hat 90 C berschritten Warten bis die Temperatur unter den Schwellenwert gesunken ist Die Pumpe durch zweimalige Bet tigung der START Taste neustarten FAULT TOO HIGH LOAD W hren...

Page 13: ...r la commande de la soupape de purge purge valve Les paragraphes suivants donnent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des rens...

Page 14: ...plac e sur une table s assurer que cette derni re est stable Ne jamais faire fonc tionner la pompe si la bride d entr e n est pas connect e au syst me ou si elle n est pas ferm e l aide de la bride d...

Page 15: ...ux r glementations natio nales en la mati re MESSAGES D ERREUR Dans certains cas de panne l ensemble de circuits d autodiagnostic du contr leur pr sente certains mes sages d erreur indiqu s dans le ta...

Page 16: ...sformateur du contr leur a d pass 90 C Attendre que la temp rature retourne au dessous du seuil Presser deux fois l interrupteur START pour remettre la pompe en marche FAULT TOO HIGH LOAD Au cours du...

Page 17: ...s para la gesti n de la v lvula de limpieza purge valve En los apartados siguientes se facilita toda la informaci n necesaria para garantizar la seguridad del operador durante el uso del equipo Una in...

Page 18: ...o si la bomba est apoyada sobre una mesa cerciorarse que es estable No poner en marcha nunca la bomba si la brida de entrada no est conectada al sistema o no est cerrada con la brida de cierre NOTA El...

Page 19: ...a que desguazar efectuar su eliminaci n respetando las normas nacionales espec ficas MENSAJES DE ERROR En algunos casos de aver a los circuitos de autodiagnosis del controler presenta algunos mensajes...

Page 20: ...ler ha superado los 90 C Esperar a que la temperatura vuelva por debajo del umbral Apretar dos veces el pulsador START para volver a poner en marcha la bomba FAULT TOO HIGH LOAD Durante el funcionamie...

Page 21: ...tro e os para a activa o da v lvula de descarga purge valve Nos par grafos seguintes est o descritas todas as informa es necess rias para garantir a seguran a do operador durante o uso da aparelhagem...

Page 22: ...pessoas e aparelhagem caso a bomba esteja apoiada numa mesa certificar se que esteja est vel Nunca activar a bomba se o flange de entrada n o estiver ligado ao sistema ou n o estiver fechado com o fla...

Page 23: ...ta o Caso um controller deva ser destru do proceder sua elimina o respeitando as normas nacionais espec ficas MENSAGENS DE ERRO Em alguns casos de defeitos os circuitos de autodiagn stico do controlle...

Page 24: ...EMPERATURE A temperatura do transformador do controller superou os 90 C Aguardar at que a temperatura volte ao limite estabelecido Premer duas vezes o bot o START para reactivar a bomba FAULT TOO HIGH...

Page 25: ...ntel heater jacket stuursignalen van de stromingsmeter en regelsignalen van de reinigingsklep purge valve In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens...

Page 26: ...en schade aan het apparaat te voorkomen Laat de pomp nooit werken zonder dat de ingangsflens aan het systeem is gekoppeld of de afsluitflens is gesloten OPMERKING De connector J1 moet met zijn jumper...

Page 27: ...gskabel afkoppelen Mocht de controller gesloopt worden ga dan overeenkomstig de specifieke nationale wetgeving te werk FOUTMELDINGEN In geval van bepaalde storingen wekt het zelfdiagnose circuit van d...

Page 28: ...E De temperatuur van de transformator van de controller bedraagt meer dan 90 C Wacht tot de temperatuur weer onder de drempelwaarde is gezakt Bedien twee maal de START knop om de pomp weer op te start...

Page 29: ...jening af udluftningsventil purge valve De f lgende afsnit indeholder al information der er n dvendig for at garantere operat rens sikkerhed i forbindelse med anvendelse af udstyret Detaljeret informa...

Page 30: ...rg for at pumpen st r fast hvis den er installeret p et bord Dette er for at forebygge skader p apparatet og personer Start aldrig pumpen hvis pumpetill bet ikke er tilsluttet systemet eller er bloker...

Page 31: ...mpen skal foreg i overensstemmelse med det p g ldende lands s rlige love FEJLMEDDELELSER N r visse fejl opst r viser styreenheden ved selvdiagnose aktuelle fejl p displayet De mulige meddelelser beskr...

Page 32: ...R OVERTEMPERATURE Temperaturen p styreenhedens transformator er over 90 C Vent p at temperaturen falder til under t rskelv rdi Tryk to gange p START for at starte pumpen igen FAULT TOO HIGH LOAD Under...

Page 33: ...reng ringsventilen purge valve De f ljande avsnitten inneh ller all information som beh vs f r att garantera operat rens s kerhet under driften Detaljerade uppgifter finns i bilagan Technical informat...

Page 34: ...en r installerad p ett bord detta f r att f rebygga skador p apparaten och personer S tt aldrig ig ng pumpen om intagsfl nsen varken r kopplad till systemet eller r blockerad p plats med l sfl nsen OB...

Page 35: ...a ske enligt g llande lagstiftning FELMEDDELANDEN N r vissa fel uppst r visar styrenhetens sj lvdiagnoskrets aktuellt felmeddelande p displayen De m jliga meddelandena listas i f ljande tabell Ing ngs...

Page 36: ...rta om pumpen FAULT CONTROLLER OVERTEMPERATURE Temperaturen p styrenhetens transformator verskrider 90 C V nta tills temperaturen sjunker under tr skelv rdet Tryck tv g nger p knappen START f r att st...

Page 37: ...styringen av spyleventilen purge valve De f lgende avsnittene inneholder all informasjon som er n dvendig for sikre brukeren n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Tech...

Page 38: ...ere at pumpen st r st tt Dette er viktig for forhindre skader p apparatet og p personer Dersom inngangsflensen hverken er tilkoplet systemet eller dersom den er blokkert av l seflensen m pumpen aldri...

Page 39: ...al kasseres m dette skje i henhold til nasjonale bestemmelser FEILMELDINGER N r det oppst r visse feil viser selvdiagnosekretsen i styreenheten den aktuelle feilmeldingen i displayet De aktuelle feilm...

Page 40: ...TEMPERATURE Temperaturen p styreenhetens transformator er over 90 C Vent til temperaturen synker under terskelverdien Trykk to ganger p knappen START for starte pumpen FAULT TOO HIGH LOAD Ved normal d...

Page 41: ...usmittarin ohjaussignaaleja ja puhdistusventtiilin ohjaussignaaleja Seuraavissa kappaleissa on kaikki tarpeelliset tiedot k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset...

Page 42: ...pumppu on asetettu p yd lle varmistakaa ett se on vakaa N in v ltyt n vammoilta ihmisille sek itse koneelle lk my sk n k ytt k pumppua mik li sis ntulon laippaa ei ole kytketty j rjestelm n tai mik li...

Page 43: ...s hk kaapeli pistorasiasta Mik li valvoja t ytyy romuttaa toimikaa sen h vitt misess kansallisten s d sten ja normien m r m ll tavalla VIANETSINT Joidenkin toimintah iri iden yhteydess valvojan itsem...

Page 44: ...E Valvojan muuntajan l mp tila on ylitt nyt 90 C tta Odottakaa ett l mp tila palaa kynnysarvon alapuolelle Painakaa START painonappia kaksi kertaa jolloin pumppu k ynnistyy FAULT TOO HIGH LOAD Normaal...

Page 45: ...purge valve Technical Information VXPEDYVHLd VXPEDYVHLd 35262 35262 6 0 6 6 0 6 2L VKPHLZYVHLd SHULHYFRXQ VKPDQWLNHYd SOKURIRULYHd SRX HYFRXQ DSRVSDVWHLY DSRY WR NHLYPHQR 324 86 324 86 20 C C 0 95 85...

Page 46: ...FLRYQL VNRYQHd DHYULD VH FZYURXd RYSRX XSDYUFHL NLYQGXQRd HYNUK Kd KY SXUNDJLDYd 0 C 40 C 0 95 7 7 Technical Information 5 6 5 6 7 8 9 6 6 7 6 0 6 2 VXQGHWKYUDd J1 TD SUHYSHL QD DIHTHLY VXQGHGHPHYQRd...

Page 47: ...NDd WRX 5XTPLVWK NDL Y 7 5 7 START 7 STOP 6817 5 6 6817 5 6 Turbo V 1000 ICE Varian Varian advance exchange service 6 7 120 Vac 1 A vent device 4 EMC heater jacket RS 232 RS 422 RS 485 8 0 9 heater ja...

Page 48: ...254 6 254 6 211 7 21 72 3803 6 3803 7O1 17 5 2 interlock P1 J1 interlock J1 interlock 8 7 3803 29 57 03 60 100 C 6 6 8 7 21752 5 29 57 03 5 785 90 C 6 6 8 7 722 2 6 8 7 6 257 5 8 7 1 6 29 592 7 6 cont...

Page 49: ...k Az elk vetkez szakaszok tartalmazz k mindazokat az ismereteket melyek a kezel biztons g t hivatottak garant lni a berendez s haszn lata sor n R szletes inform ci k tal lhat k a Technical Information...

Page 50: ...lt elhelyez sre a szem lyekben s a berendez sben val k rok elker l se rdek ben biztos tani kell az asztal stabilit s t Soha nem szabad a szivatty t a bementi peremnek a rendszerhez val csatlakoztat s...

Page 51: ...r egy vez rl t le kell selejtezni megsemmis t sekor a t rgyk rbe tartoz nemzeti norm knak megfelel en kell elj rni HIBA ZENETEK N h ny meghib sod si esetben a vez rl ndiagnosztikai ramk rei hiba zenet...

Page 52: ...l transzform tor nak h m rs klete t ll pte a 90 C t V rakozni m g a h m rs klet a k sz b rt k al esik A szivatty jraind t s hoz k tszer megnyomni a START nyom gombot FAULT TOO HIGH LOAD Norm l zem k z...

Page 53: ...aly kontrolujace fase rozgrzewania heater jacket sygnaly kontrolujace fluksometr i te sluzace do W nastepnych paragrafach zawarte sa wszystkie niezbedne informacje dotyczace gwarancji bezpieczenstwa p...

Page 54: ...bilny Pod zadnym pozorem nie uruchamiac pompy jezeli kolnierz wejsciowy nie jest polaczony z systemem lub nie jest zamknieta kolnierzem zamykajacym PRZYPIS W przypadku kiedy nie zostanie wykonane zadn...

Page 55: ...ajacy W przypadku decyzji zlomowania nalezy przeprowadzic operacje respektujac krajowe specyficzne normy BLEDNE INFORMACJE W niektorych przypadkach uszodzen obwod do autodiagnozy kontrolera pokazuje b...

Page 56: ...ntrolerze przekroczyla 90 C Odczekac az temperatura sie obnizy ponizej ustalonego poziomu Nacisnac dwa razy przycisk START dla ponownego uruchomienia pompy FAULT TOO HIGH LOAD Podczas normalnej pracy...

Page 57: ...ly pro zen ist c ho ventilu purge valve V n sleduj c ch odstavc ch jsou uvedeny ve ker nutn informace t kaj c se oper tora a bezpe nostn ch podm nek b hem provozu p stroje Podrobn informace se nach ze...

Page 58: ...ho erpadla Aby se vyhnulo nebezpe kter m e ohrozit osoby i p stroj mus se zkontrolovat jeho stabilita v p pad e erpadlo je polo en na stole Jestli e vstupn p ruba nen napojen na syst m nebo nen uzav...

Page 59: ...t dle platn ch specifick ch st tn ch norem CHYBN ZPR VY V n kter ch p padn ch poruch ch na autodiagnostick ch obvodech kontrol r p ed v n kolik chybn ch odkaz kter jsou vyjmenov ny v tabulce kter se n...

Page 60: ...ULT CONTROLLER OVERTEMPERATURE Teplota transform tora kontrol ru p ekro ila 90 C Po kat a se temperatura op t vr t pod mezn hodnotu Stisknout dvakr t tla tko START pro op tn spu t n erpadla FAULT TOO...

Page 61: ...vacieho p sma heater jacket kontroln sign ly prietokomeru a sign ly pre riadenie istiaceho ventilu purge valve alej s pop san v etky potrebn inform cie ktor ch lohou je zabezpe i bezpe nos pracovn ka...

Page 62: ...en ho arpadla Aby ste sa vyhli osobn mu nebezpe iu a po kodeniu pr stroja skontrolujte aby erpadlo umiestnen na pracovnom stole bolo stabiln erpadlo nikdy nena tartujte vtedy ke vstupn pr ruba nie je...

Page 63: ...a platn mi pr slu n mi n rodn mi normami OZNAMY V D V niektor ch pr padoch t kaj cich sa v d obvod samodiagnostiky controller signalizuje nieko ko oznamov v d uveden ch na al ej strane 1 Vstupn spojka...

Page 64: ...RE Teplota transform tora controller prekro ila 90 C Po ka k m teplota neklesne pod hranicu Stla te dvakr t tla idlo START pre znovuna tartovanie erpadla FAULT TOO HIGH LOAD Po as be n ho chodu spotre...

Page 65: ...i signali tokomera in tisti za upravljanje istilne varovalke purge valve V naslednjih odstavkih so navedene vse informacije ki so potrebne za zagotavljenje sigurnosti uporabnika med rokovanjem s to na...

Page 66: ...isi oseb kot naprave morate poskrbeti da ste rpalko stabilno polo ili e ste jo vgradili na mizi rpalka ne sme nikoli delovati e vhodna prirobnica ni priklopljena k sistemu ali e ni zaprta s zapiralno...

Page 67: ...troller zavrzite kot industrijski odpadek v skladu z dr avnimi predpisi OBVESTILO O NAPAKI V nekaterih slu ajih kvara vezje avtodiagnoze controllera poka e nekaj obvestil o napakah kot so prikazane v...

Page 68: ...rpalke FAULT CONTROLLER OVERTEMPERATURE Temperatura transformatorja controllera je presegla 90 C Po akajte da se temperatura vrne pod normalnim vrednostnim pragom Dvakrat pritisnite tipko START za pon...

Page 69: ...hs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information This manual uses the fo...

Page 70: ...and damage to the equipment if the pump is laying on a table make sure it is steady Never operate the Turbo V pump if the pump inlet is not connected to the system or blanked off NOTE The input signal...

Page 71: ...rying out any work on the controller disconnect it from the supply If a pump is to be scrapped it must be disposed off in accordance with the specific national standards ERROR MESSAGES For a certain t...

Page 72: ...roller transformer temperature exceeded 90 C Wait until the temperature decrease below threshold value Press the START push button twice to start the pump FAULT TOO HIGH L0AD In normal operation the c...

Page 73: ...and input output section microprocessor and digital section display and keyboard circuits The power supply converts the single phase 50 60 Hz AC mains supply into a 3 phase low voltage medium frequen...

Page 74: ...low blow P1 optoisolator input Minimum ON 3mA Maximum 5mA J2 optoisolator output 24 Vdc 60 mA J7 output fan forepump coil etc 120 Vac 1A disregarding the mains J11 purge flow connector 12 Vdc power su...

Page 75: ...ECHNICAL INFORMATION 71 87 900 905 01 I CONTROLLER OUTLINE The outline dimensions for the Turbo V 1000 ICE controllers are shown in the following figures Controller models 969 9447 and 969 9547 outlin...

Page 76: ...ssembly as explained above extract the voltage changer and then reposition it to view the desired voltage rating INTERCONNECTIONS The following figure shows the Controller inter connections Controller...

Page 77: ...tarting the pump the interlock contact opens it has no effect on the operation and the pump continues to turn The following figure shows a typical contact logic input connection and the related simpli...

Page 78: ...f DC current drawn by the turbopump pin 8 positive pin 15 negative 1 Vdc proportional to 1 A 9 10 Flow meter alarm the flow value remained below the threshold for 10 seconds or more Open collector typ...

Page 79: ...be read when set in the Front Remote mode read window only enabled while it can be written to and read when set in the Serial mode write window enabled Serial Port Installation An optional RS 232 422...

Page 80: ...hield being terminated to the metal shroud on the O subconnector The cable should be secured to the connector with screws RS 232 422 Communication Descriptions Communication RS 232 serial port connect...

Page 81: ...request of the value contained in a window the slave answers a string equal to the one sent by the master but in addition there is the field DATA containing the value of the window The format of the...

Page 82: ...30 2E 30 30 03 39 46 STX ADD WINDOW RD 000 00 ETX CRC Command FREQUENCY Source PC Destination Inverter 02 80 32 30 33 30 03 38 32 STX ADDR WINDOW RD ETX CRC Source Inverter Destination PC 02 80 32 30...

Page 83: ...PERATURE MEASUREMENT ENABLE 0 NO 1 YES 119 X X L HOST PRINTER MODE 0 HOST 1 PRINTER 200 X N CURRENT A 201 X N VOLTAGE V 202 X N POWER W 203 X N FREQUENCY Krpm 205 X N PUMP STATE 0 6 STOP WAITING INTER...

Page 84: ...essage is only displayed when a board with optional serial ports is installed A U T O T E S T O K R E A D Y F O R L O C A L S O F T S T A R T H S The controller with the Soft Start mode allows the pum...

Page 85: ...d in SCCM Standard cubic centimeters per minute Press the PUMP CURRENT push button and the display shows L A S T A L A R M X X X X X T X X X X X h C X X X X X Where Last alarm number of alarms sounded...

Page 86: ...ed threshold will condition the S1 and S2 operation see the following cycle diagram and it is factory set to 22 KRPM Press the CYCLE NUMBER push button to select the first number Press the PUMP CURREN...

Page 87: ...0 seconds The controller is factory set to YES NOTE The Soft Start mode may be deselected selected only when the pump is stopped Press CYCLE NUMBER push button to select YES or NO S O F T S T A R T M...

Page 88: ...he display shows R S X X X B A U D R A T E X X X X where BAUD RATE XXXX means 600 1200 2400 4800 9600 baud rate for the host computer or printer communication The controller is factory set for 9600 ba...

Page 89: ...dition S2 condition Confirm the selection by pressing the PUMP CURRENT push button In this way you enter into an operating phase named Monitor Relay Programming described later Enter the value by pres...

Page 90: ...fies the set point condition 1 is displayed when relay S1 is energized and the related output is 24 V 2 is displayed when relay S2 is energized and the related output is 24V XX KRPM indicates the actu...

Page 91: ...Pump After the starting period if the system has a vacuum leak or the pressure in the pump chamber is high from 1 mbar to atmosphere the pump continues to operate indefinitely If the gas load at the...

Page 92: ...F T S T A R T H S The value which corresponds to the board installed will be assigned to RSXXX With or without Soft Start mode selected the START STOP LOW SPEED functions are under computer control w...

Page 93: ...89 87 900 905 01 I MAINTENANCE...

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