Contents
Safety information! ............................................................. 9
Important information! ......................................................................... 9
General information ............................................................................11
Setting up and installing the equipment ............................................ 12
Ambient conditions ............................................................................ 14
Operating conditions ......................................................................... 14
Safety during operation ..................................................................... 16
Maintenance and repair..................................................................... 18
Important information: Equipment marking (ATEX) ................... 20
Technical data ................................................................... 22
Gas inlet temperatures ..................................................................... 23
Use and operation ............................................................ 26
Controlling the pump ........................................................................ 26
Installing a pump in a vacuum system .............................................. 31
During operation ................................................................................ 32
Shutdown & storage .......................................................................... 34
Accessories ...................................................................... 35
Troubleshooting ............................................................... 36
Replacing diaphragms and valves.................................. 38
Cleaning and inspecting the pump heads ........................................ 40
Replacing the diaphragm ................................................................. 41
Assembling the pump heads ............................................................ 43
............................................................................ 44
Calibration ................. 45
Warranty ............................................................................ 47
Health and safety clearance form ................................... 48
EC Declaration of Conformity of the Machinery ........... 49
