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Health and safety clearance form

Health and safety clearance form

1.  Device (Model):  ..................................................................................................................................................

2.  Serial no.:  ...........................................................................................................................................................

3.  Reason for return / malfunction:  .........................................................................................................................

 

   ............................................................................................................................................................................

4.  Has the device been used in a copper process step (e.g., semiconductor production): 

 yes    

 no 

 

      

5.  Substances (gases, liquids, solids, biological material, e. g. bacteria, viruses) in contact with the device / 

  which have been pumped:

   ............................................................................................................................................................................

   ............................................................................................................................................................................

   ............................................................................................................................................................................

   ............................................................................................................................................................................ 

6.  Risk level of the used biological material:                              

☐ 

none

☐ 

1

☐ 

2*

☐ 

3**

☐ 

4**

  *   Contact the VACUUBRAND service absolutely before dispatching the device.

  **  Devices which have been in contact with biological substances of risk level 3 or 4 cannot be checked, main- 

  tained or repaired. Also decontaminated devices must not returned to VACUUBRAND due to a residual risk.

7.  Radioactive contamination: 

         

 yes    

 no    

  

8.  Prior to return to the factory the device has been decontaminated: 

      

 yes    

 no

  Description of the decontamination method and the test / verification procedure:

   ............................................................................................................................................................................ 

   ............................................................................................................................................................................

9.  All parts of the device are free of hazardous, harmful substances:       

 yes    

 no

10. Protective measures required for service staff: 

 

   ............................................................................................................................................................................

11. If the paint is damaged, we wish a repaint or a replacement of parts for reason of appearance 

  (repaint and replacement at customer’s expense): 

         

 yes    

 no    

 

 

12. Legally binding declaration

  We assure for the returned device that all substances, which have been in contact with the device are listed in 

section 5 and that the information is complete and that we have not withheld any information. We declare that all 

measures - where applicable - have been taken listed in section “Repair - Maintenance - Return - Calibration”. 

By our signature below, we acknowledge that we accept liability for any damage caused by providing incom-

plete or incorrect information and that we shall indemnify VACUUBRAND from any claims as regards damages 

from third parties. We are aware that as expressed in § 823 BGB (Public Law Code of Germany) we are directly 

liable for injuries or damages suffered by third parties, particularly VACUUBRAND employees occupied with 

handling/repairing the product. Shipping of the device must take place according to regulations.

  Name: ..................................................................   Signature: ...........................................................................

  Job title: ...................................................................   Company’s seal: 

  Date: ........................................................................ 

  Release for repair grant by VACUUBRAND (date / signature)

:

 ...................................................................................................................

  Protective measures:    

☐ Protective gloves, safety goggles    ☐ Hood    ☐ External cleaning    

 

 

VACUUBRAND GMBH + CO KG

Alfred-Zippe-Straße 4  

97877 Wertheim - Germany

T +49 9342 808-5660  F +49 9342 808-5666

E-Mail: [email protected]

www.vacuubrand.com

Summary of Contents for MZ 2 VARIO-SP

Page 1: ...page 1 of 50 Instructions for use Technology for Vacuum Systems Diaphragm pumps MZ 2 VARIO SP MD 4 VARIO SP...

Page 2: ...phragm pump before leaving our factory is tested intensively including an endurance run of 14 hours Any faults even those which oc cur rarely are identified and can be eliminated immediately After com...

Page 3: ...equired measures must be applied Safety instructions for vacuum equipment FR Attention Le mode d emploi pr sent n est pas disponible dans toutes les langues d Union Europ enne L utilisateur ne doit me...

Page 4: ...tiende este manual En este caso se debe disponer de una traducci n t cnicamente correcta del manual completo El manual debe ser le do y entendido completamente y deben aplicarse todas las medidas de s...

Page 5: ...nte letto e compreso prima di operare con lo strumento e devono essere applicati tutti gli accorgimenti richiesti Istruzioni di sicurezza per apparecchi a vuoto JP KR LT D mesio is vadovas n ra pateik...

Page 6: ...o ci przeczytana i zrozumiana przed podj ciem pracy z urz dzeniem oraz nale y podj wszystkie niezb dne kroki zwi zane z prawid owym uzytkowaniem Wskaz wki bezpiecze stwa do urz dze pr niowych PT Aten...

Page 7: ...opravljene pa moraja biti tudi vse potrebne meritve Varnostni nasveti za vakuumske naprave SK Upozornenie Tento manu l nie je k dispoz cii vo v etk ch jazykoch E U vate nesmie obsluhova zariadenie pok...

Page 8: ...let temperatures 23 Wetted parts 24 Abbreviations 24 Pump parts 24 Use and operation 26 Controlling the pump 26 Installing a pump in a vacuum system 31 During operation 32 Shutdown storage 34 Accessor...

Page 9: ...he pump and the pumped substances VACUUBRAND disclaims any liability for inappropri ate use of these pumps and for damage from failure to follow instructions contained in this manual This manual is on...

Page 10: ...moderate injury NOTICE is used to address practices not related to personal injury Caution Hot surface Disconnect equipment from power NOTICE Formatting used in this manual Note The signal word panel...

Page 11: ...deficiencies Replace the protective caps if the equipment is not used immediately Store the equipment in dry and non corrosive conditions see also Technical data pg 22 Do not use any damaged equipmen...

Page 12: ...a pg 22 Particles and dust must not enter the pump Do not pump liquids Ensure that the pump is chemically resistant to the pumped substances prior to operation Use the equipment only as intended that...

Page 13: ...enting valve Note Flexible elements will shrink when evacuated Connect hoses gas tight at inlet and outlet of the pump Ensure that no foreign objects can be drawn into the pump Check the power source...

Page 14: ...able measures in case of differences from recommended conditions e g using the equipment outdoors installation in altitudes of more than 6500 ft 2000 m above mean sea level conductive pollution or ext...

Page 15: ...mpact mechanical stress without air substances which react explosively when being ex posed to elevated temperatures without air substances subject to auto ignition substances which are inflammable wit...

Page 16: ...uids vapors and gases To prevent any emission of such substances from the pump outlet install an appropriate collecting and disposal system and take protective action for pump and environment You must...

Page 17: ...nected components or of parts of the sup ply or change in parameters must not be allowed to lead to dangerous conditions In case of a diaphragm failure or in case of a leak in the manifold pumped subs...

Page 18: ...empera tures the pump is switched off Note Only manual reset is possible Disconnect the pump from the power source Identify and eliminate the cause of failure Maintenance and repair In order to comply...

Page 19: ...autions to protect people from the effects of dangerous substances if contamination has occurred Use appropriate protective clothing safety goggles and protective gloves Wear parts have to be replaced...

Page 20: ...which during normal operation explosive atmo spheres caused by gases vapors or mists normally don t occur or if they do occur are likely to do so only infrequently and for a short period only Equipme...

Page 21: ...mp achieves its specified ultimate vacuum is the pump s leak rate low enough to en sure that no explosive atmospheres will occur in the interior of the equip ment After any intervention at the vacuum...

Page 22: ...0 to 40 Permissible relative atmospheric moisture during operation no condensation 30 to 85 Maximum permissible installation altitude above mean sea level ft m 6500 2000 Rated motor power hp kW 0 21 0...

Page 23: ...ted range of gas temperatures at inlet Continuous operation 75 Torr 100 mbar high gas load 50 F to 104 F 10 C to 40 C Continuous operation 75 Torr 100 mbar low gas load 32 F to 140 F 0 C to 60 C Short...

Page 24: ...g plate 5 Fan Pump parts Components Wetted materials Housing cover Aluminum alloy AlSi12 Head cover Aluminum alloy AlSi12 Diaphragm clamping disc Aluminum alloy AlSi12 Diaphragm FPM Valves FPM O rings...

Page 25: ...page 25 of 50 MD 4 VARIO SP Ensure sufficient cooling of the pump MZ 2 VARIO SP 1 3 2 4 1 3 2 4 5...

Page 26: ...of the motor speed 0 to 2400 rpm Minimum motor speed 400rpm at 17 PWM Maximum motor speed 2400rpm at 100 PWM e g at a frame frequency of 100 Hz and 25 PWM pulse width 2 5 ms NOTICE The control line co...

Page 27: ...he circuit board must be carried out in a ESD protected area or under ESD protective measures NOTICE MZ 2 VARIO SP 1 Unscrew and remove the handle 2 Unscrew the cover plate 3 Remove the cover plate Re...

Page 28: ...Unscrew and remove the handles 2 Unscrew the cover plate 3 Remove the cover plate Reassemble the cover plate after having com pleted the changes size 1 2x 5 4x terminal board ST1A ST1B connection of c...

Page 29: ...PWM white black Voltage 0 10V DC white black Internal setting of the motor speed External setting of the motor speed via voltage input Voltage input analog 0V 10V DC max 24V DC Connect the black and t...

Page 30: ...creases the motor speed maximum 2400 rpm Turning the trimming potentiometer to the left decreases the motor speed minimum 400 rpm Left stop 0 rpm Maximum number of motor speed settings 50 To stop pump...

Page 31: ...tability concerning gas flow chemical resistance and resistance to clogging prior to use Make sure ventilation is adequate especially if the pump is installed in an enclosure or if the ambient tempera...

Page 32: ...w the pump to warm up before pumping condensable vapors and to clean the pump after use before it is switched off When assembling ensure vacuum tightness After as sembly check the whole system for lea...

Page 33: ...en inlet and outlet ports exceeds max 16 0 psi 1 1 bar Attempts to start the pump at higher pressure difference may cause stalling and damage of the motor Prevent internal condensation transfer of liq...

Page 34: ...eric pres sure for a few minutes Has the pump been exposed to media which may damage the pump materials or form deposits Check and clean pump heads if necessary Long term Take measures as described ab...

Page 35: ...tatic PTFE tubing KF 16 1000 mm 686031 Tubing stainless steel KF 16 1000 mm 673336 Accessories Digital vacuum gauge DVR 2 682902 For additional accessories such as vacuum valves small flange component...

Page 36: ...in the pipeline or vacuum system Check pump directly connect vacuum gauge directly at pump inlet then check connection pipeline and vacuum system if necessary Long narrow vacuum line Use lines with l...

Page 37: ...ssure especially with condensable vapors Diaphragm crack or diaphragm clamping disc loose Perform maintenance Other than above men tioned causes Contact local distributor Pump seized Contact local dis...

Page 38: ...ion Ensure that the pump is decontaminated before maintenance Avoid the release of pollutants Never operate a defective or damaged pump Take adequate precautions to protect people from the effects of...

Page 39: ...tions the drive system is maintenance free In demanding circumstances it may be efficient to check and clean the pump heads on a regular basis In normal use the lifetime of the diaphragms and valves i...

Page 40: ...teady with a second open end wrench width 20 F Diaphragm G Diaphragm support disc H Washer I Connecting rod J Housing A Housing cover B O rings C Valves D Head cover E Diaphragm clamping disc with squ...

Page 41: ...gnment of valves C Remove the valves Replace valves or O rings if necessary Use petroleum ether or other industrial solvent to remove deposits Do not inhale vapors Replacing the diaphragm Check diaphr...

Page 42: ...rew of the diaphragm clamping disc is correctly seated in the guide hole of the diaphragm support disc Lift the diaphragm at the side Place the diaphragm carefully together with diaphragm clamping dis...

Page 43: ...s B in place See figure for the correct position of the valves Inlet side of pump head 1 The valve tongue points at the kidney shaped orifice in the valve seat Outlet side of pump head 2 The valve is...

Page 44: ...end wrench width 20 If the pump does not achieve the ultimate vacuum Whenever the diaphragms and valves have been replaced a break in period of several hours is required before the pump achieves its...

Page 45: ...red Also decontaminated devices must not returned to VACUUBRAND due to a residual risk The same conditions apply to on site work No repair maintenance return or calibration is possi ble unless the cor...

Page 46: ...e parts for cosmetic reasons at your request and at your expense Before returning the device Pack the device properly if necessary please order origi nal packaging materials at your costs Mark the pac...

Page 47: ...rmal wear and tear of wearing parts such as diaphragms seals valves vanes condensers oil and the breakage of glass or ceramic parts for the consequences of chemical electrochemical or electrical influ...

Page 48: ...for reason of appearance repaint and replacement at customer s expense yes no 12 Legally binding declaration We assure for the returned device that all substances which have been in contact with the d...

Page 49: ...ating plate Voir plaque signal tique Angewandte harmonisierte Normen Harmonized standards applied Normes harmonis es utilis es DIN EN ISO 12100 2011 DIN EN 61010 1 2011 IEC 61010 1 2010 Ed 3 DIN EN 10...

Page 50: ...fore strictly the users responsibil ity to very carefully check the application of these data to their specific requirements No claims arising from the information provided in this lit erature will co...

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