Ulvac UK-2, Instruction Manual

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Auto Regeneration Controller Model UK-2 Instruction Manual
CRYO PUMP STOP
BAND HEATER ON
N2 IN VALVE OPEN
N2 OUT VALVE OPEN
Press. = ATM
NO
YES
1ST TEMP > _1ot(150K)
and
2ND TEMP > 2ot(150K)
NO
YES
INNER HEATER ON
NO
YES
1ST TEMP > _1rt(300K)
and
2ND TEMP > 2rt(300K)
N2 PURGE TIME Up
(Pgt = 0 〜 999min)
NO
YES
Press. < _LP(40Pa)
NO
○
ROUGHING
Delay 5sec
ROUGH VALVE OPEN
１
N2 OUT VALVE CLOSE
ROUGH PUMP ON
N2 IN VALVE CLOSE
○
WARM UP
○
N2 PURGE
２
YES
ROUGH VALVE CLOSE
Build UP Test(5min)
Press. < hP (67Pa)
NO
YES
ROUGH VALVE OPEN
Press. < _LP(40Pa)
Mode2 END
ROUGH PUMP OFF
ROUGH VALVE CLOSE
２
INNER HEATER OFF
BAND HEATER OFF
Mode2 START
１
【
LED STATUS
】
○
HEATER START
○
BUILD UP
Figure 8-2 Mode 2 (WARM UP) Operation Flow Chart
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