Ulvac UK-2, Instruction Manual

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Auto Regeneration Controller Model UK-2 Instruction Manual
9.2 Factory Setting
Table 9-1 shows the default setting of the parameter.
Table 9-1 Parameter factory setting
Set
Command
Description
Setting
Range
Initial
Value
_2rt 2ND ROOM TEMP (Target value of 2nd heater control)
10 〜 350 300K
_2rd
2ND READY TEMP
(The temperature to which 2nd stage will be cooled down.)
10 〜 350 20K
_2AL 2ND ALARM TEMP (Upper limit value during coolldown.) 10
〜
350 20K
_1rt 1ST ROOM TEMP (Target value of 1st heater control) 45
〜
350 300K
_1rd
1ST READY TEMP
(The temperature to which 1st stage will be cooled down.)
45 〜 350 130K
_1AL 1ST ALARM TEMP (Upper limit value during coolldown.) 45
〜
350 150K
oh
OVER HEAT TEMP
(The temperature at which an overheat protection alarm will be activated.)
45
〜
350 340K
_Pgt PURGE TIME (Time for purging N2 after warm up.) 0
〜
999 5min
_tt WAIT TIME (Wait timer after cooldown has been completed.)
0 〜 999
10min
_hP HI PRESS (The highest limit of pressure that a Cryopum can be started.) 1
〜
99 67Pa
_LP
LOW PRESS
(The lowest limit of pressure that a Cryopum can be started.
）
1
〜
99 40Pa
_2ot
※
1
The temperature at which 2ND HEATER turns ON. 10 〜 350 150K
_2Pb
※
1
Proportional band of 2ND HEATER. ※
1
1
〜
100 2K
_2ti
※
1
Integral time of 2ND HEATER.
0 〜 999 150sec.
_2td
※
1
Derivative time of 2ND HEATER. 0
〜
300 24sec.
_2Pt
※
1
Proportion-cycle of 2ND HEATER.
0.1 〜
10.0
10.0sec.
_2Lt
※
1
Maximum energizing time of 2ND HEATER.
※
2
0
〜
300 45min
_1ot
※
1
The temperature at which 1ST HEATER turns ON. 45
〜
350 150K
_1Pb
※
1
Proportional band of 1ST HEATER
1
〜
100 2K
_1ti
※
1
Integral time of 1ST HEATER. 0
〜
999 150sec.
_1td
※
1
Derivative time of 1ST HEATER.
0
〜
300 24sec.
_1Pt
※
1
Proportion-cycle of 1ST HEATER.
0.1
〜
10.0
10.0sec.
_1Lt
※
1
Maximum energizing time of 1ST HEATER. ※
2
0
〜
300 45min
ULVAC CRYOGENICS INCORPORATED
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