1
1.
Specifications
The SPU Pirani vacuum gauge measuring unit is a dedicated measuring unit for the SH2
multi-ionization gauge.
Please note that this unit cannot be used independently.
1.1.
Basic specifications
Name
Pirani vacuum gauge measuring unit
Model
SPU
Measurement principle
Pirani vacuum gauge that uses thermal conduction by gas molecules
Number of gauge heads
1pc
Applicable gauge head
WP-16
Measurement pressure range
4x10
-1
Pa to 3x10
+3
Pa
Output pressure range
1x10
-1
Pa 1x10
+4
Pa
Accuracy (N
2
)
1.0x10
-1
Pa to 4.0x10
-1
Pa: no accuracy guarantee
4.0x10
-1
Pa to 1.0x10
+0
Pa: ±30%
1.0x10
+0
Pa to 1.0x10
+3
Pa: ±15%
1.0x10
+3
Pa to 3.0x10
+3
Pa: ±30%
3.0x10
+3
Pa to 1.0x10
+4
Pa: no accuracy guarantee
Repeatability
±10% (at a constant operating environment temperature)
Sampling time
50 ms, 5x moving average
Measurement value output
Output by serial communication
LED display
POWER/ERROR LED
Gauge head material
Filament: Pt
Other: CuZn/Ni plating, Kovar glass, Ni, SnSb
Gauge head withstand pressure 2x10
+5
Pa (abs)
*Take the withstand pressure for flanges, clamps, and other
components into account separately.
Operating temperature range
10 to 50°C
Operating humidity range
15% to 85% RH (no condensation)
Storage temperature
-20 to 65
℃
(no condensation)
IP code
IP30
Power supply voltage
5 VDC
I/O connector
RJ-45 jack connector
Gauge head internal volume
Pirani vacuum gauge head (WP-16): 22 cm
3
Weight
External dimensions
φ40x51 (controller section only)
1.2.
Unpacking and quantity check
When the product is delivered, promptly unpack and check it.
Check that the product was not damaged during shipping. Check that the proper quantity of
accessories was included with the product.
SPU Pirani vacuum gauge measuring unit
1
Pirani vacuum gauge head (WP-16)
1
Instruction manual
(included with the SH2 multi-ionization gauge)
1
