Ulvac SPU Instruction Manual Download Page 1

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No.SK00-9657-EI-003-01

G-TRAN

Series

Pirani Vacuum gauge
Measuring Unit SPU

Instruction Manual

Components Division,

ULVAC, Inc.

S/N:00001 and higher.

Read this manual before operation and keep it at
hand for immediate reference.

Summary of Contents for SPU

Page 1: ...Measuring Unit SPU Instruction Manual Components Division ULVAC Inc http www ulvac co jp This manual is for this unit units of the following serial numbers S N 00001 and higher Read this manual befor...

Page 2: ......

Page 3: ...ty Symbols Safety symbols are used throughout this instruction manual to call the operator s attention to safety The terminology used in safety symbols is classified below Indicate status of urgency o...

Page 4: ...ly to a grounded vacuum chamber Use a conductive metal clamp on the NW flange If this unit is not correctly connected it will not only show the wrong pressure there is a risk of damage to this unit an...

Page 5: ...zation of moisture or organic matter pressure accuracy and response speed will be affected Review installation locations and methods so that fouling does not occur Moisture and fouling The ambient tem...

Page 6: ...ry There is a risk of damage if this unit is transported without packaging or transported attached to the equipment Transportation packaging When disposing of this unit please follow all local laws an...

Page 7: ...3 2 LEAK TEST 6 4 HANDLING PRECAUTIONS 7 4 1 PRECAUTIONS RELATED TO THE USAGE ENVIRONMENT 7 4 2 PRECAUTIONS RELATED TO USAGE 7 4 3 ATTACHING THIS UNIT 7 4 3 1 This unit attachment environment 7 4 3 2...

Page 8: ...e Measurement value output Output by serial communication LED display POWER ERROR LED Gauge head material Filament Pt Other CuZn Ni plating Kovar glass Ni SnSb Gauge head withstand pressure 2x10 5 Pa...

Page 9: ...re 2 1 SPU controller section explanatory drawing Name symbol Function I O connector The I O connector for the power supply and signals RJ 45 jack connector Gauge head clamp The clamp to hold and lock...

Page 10: ...igure 2 2 SPU LED explanatory drawing Name symbol Function POWER ERROR LED On Operating normally Flashing Error such as a filament break this unit is malfunctioning Off Power off this unit or the SH2...

Page 11: ...ctor pin assignment diagram Terminal number This unit Signal direction Connection destination 1 Power supply 5 VDC SH2 Multi ionization gauge 2 GND 3 Power supply 5 VDC 4 Communication terminal 5 Comm...

Page 12: ...e filament in the gauge head Power on Perform a leak test when the gauge head is replaced and attached There is a possibility of leaking from impacts to the pin section Leak test 3 1 Attaching the gau...

Page 13: ...igure below the gauge head may leak from the constrictive clamp Insufficiently inserted Leak occurs Fully inserted 3 2 Leak test When the gauge head is attached we recommend performing a leak test in...

Page 14: ...um chamber and protect this unit so it is not exposed to these gases as much as possible by using this unit with the isolation valve closed Use in a CVD gas atmosphere The ambient temperature of the g...

Page 15: ...is thin at 25 m so avoid use in a location with a large amount of vibration as much as possible The biggest cause of filament breaks is from mechanical shock so use caution regarding the installation...

Page 16: ...asurements are dependent on the type of gas An environment with a large quantity of fouling Assume internal gauge head contamination Replace the gauge head Pressure does not reach 0 4 Pa or lower even...

Page 17: ...fer Cause Action The gauge head is dirty Sensitivity has dramatically deviated Replace the gauge head with another gauge head and check the phenomena If there is no problem with the other gauge head t...

Page 18: ...rature of the gas molecule after the collision If the energy transfer on the filament surface was complete 1 The value of has complicated properties that change according to geometric roughness the pr...

Page 19: ...5 3 7 7 5 1 4 3 6 7 4 3 5 3 4 7 4 1 2 9 3 7 10 9 3 1 5E 1 9 4 8 5 1 3E 1 8 0 1 1E 1 9 8 7 4 5 6 7 2 20 1 7E 1 2 7E 1 2 0E 1 1 9E 1 2 9E 1 1 7E 1 2 1E 1 2 1E 1 1 5E 1 1 2E 1 1 9E 1 50 3 5E 1 6 0E 1 5...

Page 20: ...r to the local ULVAC representatives for repair Return charge shall be paid by Buyer Disclaimer 1 Failure occurred after expiration of warranty period 2 Failure caused by force majeure such as fire st...

Page 21: ...contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Printed Circuit Board X O O O O O Chassis O O O O O O Connector O O O O O O Label O O...

Page 22: ...15 9 Dimensions 9 1 SPU dimensions 40 51 113 82 30 R40...

Page 23: ...16 9 2 Gauge head dimensions 18 NW16 96 102 5...

Page 24: ...17 9 3 Unit cable SPU P1 RJ 45 P2 RJ 45 WIRE COLOR 1 1 WHITE ORANGE 2 2 ORANGE 3 3 WHITE GREEN 6 6 GREEN 5 5 WHITE BLUE 4 4 BLUE 7 7 WHITE BROWN 8 8 BROWN Shell Shell DRAIN...