Ulvac PKS-030, Instruction Manual

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13. Major Expendable Parts (Parts No.: See Fig.-9, 10)
Model1: PKS-016 (Parts No.: See Fig. 10)
Parts No. Description Q'ty
(18) Bearing No.6307 2
(24) Oil-seal VC-40625 2
(23) Oil-seal SC-406212 2
(25) Oil-seal SC-355511 1
(11) O-ring JISB-2401 G-75 2
(8) O-ring JISB-2401 G-105 2
Model2: PKS-030 (Parts No.: See Fig. 11)
Parts No. Description Q'ty
(22) Bearing No.6410 2
(25) Oil-seal VC-65885 2
(26) Oil-seal SC-658812 2
(27) Oil-seal TC-478012 2
(21A) O-ring JISB-2401 P-50 2
(12A) O-ring JISB-2401 G-130 1
Model3: PKS-070 (Parts No.: See Fig. 12)
Parts No. Description Q'ty
(19) Bearing No.21313 2
(22) Oil-seal VC-70955 1
(23) Oil-seal
SC-709513
(Vacuum tight type)
1
(25) Oil-seal VC-65886 1
(26) Oil-seal
SC-658812
(Vacuum tight type)
1
(24) Oil-seal TC-658812 2
(13) O-ring AN 6230-31 2