ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
6. Maintenance
60
6.1. Maintenance/Inspection of this product
Except for check items 10 to 12, be sure to switch the three-phase input power supply of the EB power
supply to OFF.
Table 6.1: Pre-maintenance Check List
Item
Inspection and Work Description
Inspection period *1
Remarks
Daily Weekly Monthly
1
Is a protection cover attached to where a high voltage is applied?
Does the structure prevent fingers or rods from getting in the cover?
○
NOTE 1
2
Does dirt or dust adhere to the surface of various introduction
terminals on the EB gun? Do any separated films etc. adhere to the
vacuum side of the introduction terminals?
○
NOTE 2
3
Is the connection between the OUT PUT cable and the high voltage
introduction terminal loose? Is there any dangerous condition due to
oxidation by heat or dissolution of coating on the cable side?
○
NOTE 3
4
Is the connection of the EARTH GUN GND cable loose?
○
NOTE 4
5
Are the connections between the DEF
／
XY OUT cable or the XY
cable, the current introduction terminal, and the magnet coil loose?
In addition, is there any dissolution of coating of the wiring or film
entirely deposited?
○
NOTE 5
6
Is any state found that replacement is needed due to a worn or
deformed filament of the EB gun?
○
NOTE 2
7
Is the lead wire of the filament line on the loading side thinner by
sputtering? In addition, are the connections loose?
○
NOTE 6
8
Is the lead wire for the EB gun deflection coil 20 mm or more away
from the high voltage line? In addition, are the connections short-
circuited or broken?
○
NOTE 7
9
Is the gun shield and the ground potential in the chamber 15 mm or
more away from the high voltage line? (Take care especially after
replacement of filament.)
○
NOTE 8
10
When the door of the chamber or the vacuum chamber is closed,
does the CHAMBER indicator of the gun controller light up?
○
11
When the pressure in the chamber is equal to or lower than the set
value, does the VACCUM indicator light up?
○
12
When the amount of cooling water of the EB gun is equal to or higher
than the set value given by the EB gun, does the GUN WATER
indicator light up?
○
For 18 hr/day operation
