Instructions Manual
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Multiple Roots Type Dry Pump GR60/90/180
YK09-0023-DI-003-02
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(2) Direct export:
An alternative is delivered or the product is sent back to us or the nearest our service center for
repair. The return cost shall be borne by the customer.
9.5 Others
(1) If there are individual contracts and memorandum related to specifications in addition to this
document, the contents in those documents prevail.
(2) Please let us know if you export this product from Japan and take necessary procedures
according to the provisions of export-related laws and regulations, such as foreign exchange
laws and foreign trade laws.
(3) For any questions and consultation on this product, check the model/serial number and then
contact the nearest sales office or agency, or our Components Division.
https://www.ulvac.co.jp/support_info/
(4) Note that the contents in this document is subject to change without prior notice.
