Ulvac GN-30i, Instruction Manual

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ULVAC CRYOGENICS INCORPORATED I
Introduction
Thank you for choosing our product. This instruction manual provides information and
precautions on handling, installation, operation, and maintenance of the product.
This product is intended for use by qualified personnel who recognize shock hazards and are
familiar with the safety precautions required to avoid possible injury. To ensure proper use of this
product, read this instruction manual carefully and keep this manual close at hand so that you
can use for reference during operation.
If you purchased our other products and/or optional devices with this product, read relevant
instruction manuals carefully.