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4. Operation
4.1 Cautions for operation
There is a risk of explosion. Never block the outlet or operate the pump with
equipment mounted at the outlet side which blocks the passage of gas.
Otherwise, the pump internal pressure increases causing the pump to explode,
the oil level gauge to protrude or the motor to be overloaded.
This pump is not resistant to pressure. The internal pump pressure is limited
to 0.03 MPa (gauge pressure).
Do not stop and restart this equipment repeatedly. When restarting this
equipment, make sure that the pump (motor) has stopped completely before
turning on the power. If the pump (motor) has not stopped completely and the
equipment is restarted, the pump’s (motor) current rises and either the
protection device is activated or the motor may become damaged.
① In the process of manufacturing semiconductors, pump oil may deteriorate
over a very short period of time. It is recommended that the pump oil
should be replaced within 10 days after starting use of the pump, and
the replacement frequency of the pump oil should be decided based on the
contamination level of the pump oil.
② If the pump evacuate a lot of moisture, replace the oil frequently. If
the pump is used with gas which contains a lot of moisture, the lubricity
of the pump oil deteriorates and corrosion of the pump’s components
advance, causing the pump to malfunction.
③ If chemicals including acid has been evacuated, the pump may become rusty
while it is not being operated (i.e. overnight), making operation
impossible. If such chemicals are evacuated, replace the pump oil
immediately.
④ Solvents which deteriorate the lubricity of the pump oil will cause
scoring, etc. If such a solvent is evacuated, replace the oil.
⑤ If operation is performed continuously at a high evacuation pressure of
10 kPa or more, a large amount of pump oil is consumed, causing a shortage
of oil and insufficient lubrication of the pump. If such a condition
continues, components will rapidly wear and become scored. Avoid
continuous operation at a high evacuation pressure as much as possible
and, without fail, add pump oil.
Warning
Note
Caution
