Contents - 3
Figures and Tables
Fig. 1 Dimensional drawing of GLD-051 oil sealed rotary vacuum pump ········· 4
Fig. 2 Dimensional drawing of GLS-051 oil sealed rotary vacuum pump ········· 4
Fig. 3 Lubrication of the oil sealed rotary vacuum pump ······················ 5
Fig. 4 Basic piping diagram to the vacuum chamber ·························· 6
Fig. 5 Change region of the voltage and frequency ·························· 7
Fig. 6 Pumping speed curve
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Fig. 7 Characteristics of Motor power
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Fig. 8 Replacement of the coupling spider
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Fig. 9 Disassembly drawing of GLD-051 oil sealed rotary vacuum pump ········· 26
Fig. 10 Disassembly drawing of GLS-051 oil sealed rotary vacuum pump ········· 27
Table 1 Specification
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Table 2 Periodic inspection table
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Table 3 Trouble check list
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Table 4 GLD-051 Maintenance parts list
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Table 5 GLS-051 Maintenance parts list
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Attached table: Safety Data Sheet for Vacuum Pump Oil SMR-100
