9
DRAWING AND TABLE LIST
Fig-1 General assembly drawing of G-5DA
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Fig-2 General assembly drawing of G-10DA
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Fig-3 Oil charge to rotary vacuum pump
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Fig-4 Vacuum pumping system diagram
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Fig-5 Change region of the voltage and frequency ・・・・・・・18
Fig-6 Characteristics of vacuum pumping speed
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Fig-7 Characteristics of motor power
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Fig-8 Replacement of the coupling
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Fig-9 Disassembly drawing of G-5DA
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Fig-10 Disassembly drawing of G-10DA
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Table-1 Specification
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Table-2 Characteristics of the thermal protector
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Table-3 Scheduled inspection
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Table-4 Trouble shooting list
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Table-5
G-5DA Maintenance parts list
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Table-6
G-10DA Maintenance parts list
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