Thyracont VSH87E, Operating Instructions Manual

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2.3 Product Description
The VSH vacuum transducer is measuring total gas pressure in the range of
5.0x10
-10
- 1000 mbar. Readings and data are transmitted via EtherCAT interface,
the device must be connected to suitable components only.
In addition the device has a serial RS485 interface for digital data transfer (see
section 5.1).
The VSH is equipped with a metal-sealed combination sensor type Pirani / Hot
Cathode (Bayard Alpert) and temperature compensated. It can be mounted to sui-
table flange connectors.
Proper Use
The VSH serves exclusively to provide absolute pressure measurements in ga-
seous media. It may only be connected to components specifically provided for
such purpose.
Improper Use
The use for purposes not covered above is regarded as improper, in particular:
−
connection to components which are not specified for in their operating in-
structions
−
connection to components containing touchable, voltage carrying parts.
No liability or warranty will be accepted for claims arising from improper use.
The user bears the responsibility with respect to the used process media.
The device is not designed for use in corrosive gas atmosphere.
Aggressive media such as halogenides, carbon or oxygen plasma
can reduce sensor life-time!
Dust, oil or condensing vapours will affect sensor performance and
may cause malfunction!
Hydrocarbons, which can emerge in the process gas due to the
use of oil-sealed vacuum pumps, will increase wear and tear of the
hot cathode filaments!
VSH-EtherCAT-200116