Chapter 5 Specifications
Page 13
Rev K Jul 2021
Chapter 5 Specifications
5.1 Stage Specifications
Parameter
Value
Stage
MTS25(/M)
MTS50(/M)
Travel Range
25 mm (1”)
50 mm (2”)
Bidirectional Repeatability
±0.8 µm
Backlash
<6 µm
Maximum Acceleration
4.5 mm/s
2
Maximum Velocity
2.4 mm/s
Max Vertical On-Axis Load Capacity
4.5 kg (10 lbs)
Max Horizontal On-Axis Load Capacity
12 kg (25 lbs)
Min Theoretical Incremental Movement
a
0.03 µm
Min Repeatable Incremental Movement
0.8 µm
Absolute On-axis Accuracy
145 µm
290 µm
Maximum Percentage Accuracy
0.3%
0.7%
Home Location Accuracy
± 4.0 µm
Pitch
±0.02°
±0.025°
Yaw
±0.025°
±0.03°
Weight
0.31 kg
0.34 kg
Software Compatibility
APT: Server CDM621 V2.9.0 or later.
Kinesis: V1.14.28 or later.
a. This represents 1 encoder count.
