Microscope Maintenance
38
VEGA 3 SEM
9
Microscope Maintenance
9.1
Basic Microscope Accessories
This document describes the use of the most important tools included in the microscope
accessories. The exact list is attached to the packaging list of the microscope.
1.
Hexagonal screwdriver, size 3.0 mm – general use, mainly various flange screws, the
most common size used for screws.
2.
Flat screwdriver, size 3.2 mm – general use.
3.
Low vacuum aperture holder with screw, size M3x25 – used for the removal of the
low vacuum aperture holder.
4.
Basic specimen stubs.
5.
Hexagonal screwdriver, size 2.5 mm – used for mounting / dismounting sample
stage Z extensions (LS, LM chambers) and the stub holders (XM chamber).
6.
The distance washers.
7.
Aperture holder.
8.
Hexagonal screwdriver, size 1.5 mm – used for fixing the screws in the sample stage
and securing the screws of the cathode.
9.
Aperture 50 µm.
10.
Aperture 500 µm.
11.
Vacuum grease – used for sealing the O-Rings.
12.
The base for centering the Wehnelt cylinder.
