Tencor AlphaStep 200 Manual Download Page 7

highlighted  area  directly  below  shows the distance between the  cursors.   To
measure  the  width  of  a feature,  position  on  cursor  on each side of it and

          read the horizontal distance shown in the  highlighted
          area under HORIZ.

Once positioned, the cursors will retain  those  positions for subsequent scans.
They will not move unless forced to do so by a change in scan length or they are
moved  by the operator.  If a batch of similar samples is to be tested, the cursors
can be left  in  position and the measurement can be read directly from the data

          summary with minimum operator intervention.

4.3.   Leveling the Plot

When the profile is plotted after a scan, a  leveling program aligns the trace to the
two axes to facilitate accurate  measurement.   Leveling  cursors,   vertical lines
normally  invisible  to  the  user, are used to indicated two points on the profile
whose heights  are equal.   The  leveling program re-computes the measurement
data to make these heights equal on the  display.  The rest of the profile is
displayed relative to these points.

The leveling cursor are normally located at  the  ends other  scan.   If  one  cursor is
on a surface feature higher or lower than the other cursor,  the  substrate

          will  appear tilted when the program makes both cursor heights equal.

The condition described above can be corrected by moving  the  leveling  cursors
to  places on the profile where the heights are equal.   Ideally,  these  should
both  be on the substrate, near the ends of the scan, although any equally high
points may be used.

If the message "SCAN MENU may now be changes"  is displayed, press ENT to
terminate "Enter Mode".

1. Press the orange LEVEL key.  The screen will  show the  leveling  cursors
which  are dotted vertical lines, instead of the dashed lines  used  for measurement
cursors.   The following message will appear at the bottom of the screen:
"MANUAL LEVELING may now be changed".

2. Position the cursor  so  the  actual  profile height  is  the  same  at each cursor.
Ignore the indicate profile height.  The leveling cursor  are moved using the <- and
-> keys in conjunction with CUR as described in Section 4.2.

3. Press the PLOT or ENT key.   The profile  will  be redrawn with the points
under the cursors at equal heights.  The horizontal positions of the leveling cursors
are shown in the lower left corner of the screen.

        4.4.  Plotting Individual Profile Features - Zoom

Summary of Contents for AlphaStep 200

Page 1: ...e scan as well as scan profiles and a summary of scan data The system has three operating modes manual for single scans semiautomatic for multi point scans and automatic for repeated multi point scans The system allows the operator to set and store if desired a variety of scan parameters such as scan direction scan length sampling rate and vertical units kA vs Mm Measurement cursors are used to le...

Page 2: ...ed a plot of the scan is displayed along with pertinent data and information on the scan characteristics The cursors displayed on the plot are positioned by the operator to level the plot and or obtain the desired data The figure in the hard copy manual shows what the display looks like The following describes the data display as read from top to bottom ID Optional identifier for sample assigned b...

Page 3: ...ple density specifications scan time scan direction stylus force and the vertical units 2 4 Keyboard There is a figure showing the keyboard in the hard copy manual A brief description of key functions follows For further information on using the keyboard see the detailed operating procedures in Section 3 ENT Enter Pressing this button will initiate terminate Enter Mode in which the operator can ch...

Page 4: ... change as either the or down arrow key is pressed PLOT Used to zoom in on a section of a profile between the measurement cursors or to level a profile CUR This key and its associated and keys allow the operator to set scan direction and place the measurement cursors LEVEL Used to level the baseline of a profile TABLE The and down arrow keys will move the sample chuck up and down respectively PRIN...

Page 5: ...een You should see your sample come into view and the stylus lower and come to rest on the surface of your substrate If you continue to press TABLE the stylus will retract Thus the TABLE button toggles the stylus between its fully retracted and lowered position Always retract the stylus when moving the sample 6 Use the zoom knob to adjust the magnification of your sample Use the stage arrow keys t...

Page 6: ...data summary on the left side of the screen The CUR button selects the cursor to be moved You can see the active cursor indicator appear over each cursor in turn and then over both as you repeatedly press this button When both cursors are active they will remain a fixed distance apart as they move simultaneously The arrow buttons will move the cursor s in the direction indicated Holding down these...

Page 7: ...lly located at the ends other scan If one cursor is on a surface feature higher or lower than the other cursor the substrate will appear tilted when the program makes both cursor heights equal The condition described above can be corrected by moving the leveling cursors to places on the profile where the heights are equal Ideally these should both be on the substrate near the ends of the scan alth...

Page 8: ...e screen showing the entire profile press ABT This undoes all zooming but leaves the cursors at their most recent positions on the profile Pressing CUR then ABT undoes all zooming and returns the cursors to the ends of the scan 4 5 Average Difference Mode In Average Difference mode the system computes the difference between average height measurements When this mode is entered the currently displa...

Page 9: ...y 4 6 Printing There are three available printing modes Screen in which the entire contents of the screen including the plot of the profile is printed Summary Data prints out only the data shown on the left side of the screen Data Send sends all data to the RS 232C serial output instead of the printer Screen and Summary Data print modes are used to make print outs on the internal printer or on the...

Page 10: ...that the paper unwinds from underneath as it leaves the spool This is thermal paper if you do not have the correct side facing the printer nothing will be printed on the paper 5 Insert the paper underneath the rubber roller from behind This is easier if the end of the paper is cut so that it tapers to a point 6 The paper will emerge at the top of the rubber roller aiming back Pull out several inch...

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