background image

RESET

If pressed prior  to  a  scan,  will  return measurement cursors to their
position during the previous scan.  Used for  other  miscellaneous
operations, such as setting the time clock.

Stage Keys

These include the 4 arrow keys and  the  NXT (next)   key  in  the  center.
The  arrows indicate the direction in which  the  stage, (not  the  stylus),
will move when pressed. They are used to move the sample  stage  and
during stage programming.  The stage has two speeds in each direction:
0.13  mm/sec  and 13  mm/sec.  Pressing the NXT key before the desired
arrow key causes the stage  to  move at the faster rate.

RANGE

Allows   the   user   to   set   the    scan length/sample   density. The
highlighted values change as either the ^  or “down arrow”  key  is
pressed.

PLOT

Used to zoom in on a section  of  a  profile between the measurement
cursors, or to level a profile.

CUR

This key and its associated <- and  ->  keys allow the operator to set scan

direction and place the measurement cursors.

LEVEL

Used to level the baseline of a profile.

TABLE

The ^  and “down arrow” keys will move the  sample  chuck up and down

respectively.

PRINT

Guess.

FEED

Printer paper feed.

START/STOP

Starts/stops the scan.

3. Operating Procedure

3.1.  Setting Scan Parameters

Up to 9 scan menus containing scan parameters  can  be stored  in the system.  It is
usually convenient, however, to simply bring up the default menu  and  modify it to suit
your needs, as follows.

1.  Make sure the power is on.  Turn  up  the  brightness.

2.  Press VID to bring up a menu.

3.

 

Press ENT to initiate "Enter Mode".  You will  see a  message  at the bottom of the

Summary of Contents for AlphaStep 200

Page 1: ...e scan as well as scan profiles and a summary of scan data The system has three operating modes manual for single scans semiautomatic for multi point scans and automatic for repeated multi point scans The system allows the operator to set and store if desired a variety of scan parameters such as scan direction scan length sampling rate and vertical units kA vs Mm Measurement cursors are used to le...

Page 2: ...ed a plot of the scan is displayed along with pertinent data and information on the scan characteristics The cursors displayed on the plot are positioned by the operator to level the plot and or obtain the desired data The figure in the hard copy manual shows what the display looks like The following describes the data display as read from top to bottom ID Optional identifier for sample assigned b...

Page 3: ...ple density specifications scan time scan direction stylus force and the vertical units 2 4 Keyboard There is a figure showing the keyboard in the hard copy manual A brief description of key functions follows For further information on using the keyboard see the detailed operating procedures in Section 3 ENT Enter Pressing this button will initiate terminate Enter Mode in which the operator can ch...

Page 4: ... change as either the or down arrow key is pressed PLOT Used to zoom in on a section of a profile between the measurement cursors or to level a profile CUR This key and its associated and keys allow the operator to set scan direction and place the measurement cursors LEVEL Used to level the baseline of a profile TABLE The and down arrow keys will move the sample chuck up and down respectively PRIN...

Page 5: ...een You should see your sample come into view and the stylus lower and come to rest on the surface of your substrate If you continue to press TABLE the stylus will retract Thus the TABLE button toggles the stylus between its fully retracted and lowered position Always retract the stylus when moving the sample 6 Use the zoom knob to adjust the magnification of your sample Use the stage arrow keys t...

Page 6: ...data summary on the left side of the screen The CUR button selects the cursor to be moved You can see the active cursor indicator appear over each cursor in turn and then over both as you repeatedly press this button When both cursors are active they will remain a fixed distance apart as they move simultaneously The arrow buttons will move the cursor s in the direction indicated Holding down these...

Page 7: ...lly located at the ends other scan If one cursor is on a surface feature higher or lower than the other cursor the substrate will appear tilted when the program makes both cursor heights equal The condition described above can be corrected by moving the leveling cursors to places on the profile where the heights are equal Ideally these should both be on the substrate near the ends of the scan alth...

Page 8: ...e screen showing the entire profile press ABT This undoes all zooming but leaves the cursors at their most recent positions on the profile Pressing CUR then ABT undoes all zooming and returns the cursors to the ends of the scan 4 5 Average Difference Mode In Average Difference mode the system computes the difference between average height measurements When this mode is entered the currently displa...

Page 9: ...y 4 6 Printing There are three available printing modes Screen in which the entire contents of the screen including the plot of the profile is printed Summary Data prints out only the data shown on the left side of the screen Data Send sends all data to the RS 232C serial output instead of the printer Screen and Summary Data print modes are used to make print outs on the internal printer or on the...

Page 10: ...that the paper unwinds from underneath as it leaves the spool This is thermal paper if you do not have the correct side facing the printer nothing will be printed on the paper 5 Insert the paper underneath the rubber roller from behind This is easier if the end of the paper is cut so that it tapers to a point 6 The paper will emerge at the top of the rubber roller aiming back Pull out several inch...

Reviews: