Series
1 2
0.2 0.5
5 10 20 25 50 100 150 200 300
500 600
1000
2000
3000 6000
12000
Rated flow range [L/min]
0.5
25
1
50
2
100
2
200
5
500
10
1000
1
10
5
50
10
100
20
200
50
500
150
3000
300
6000
600
12000
0.2
10
−0.5
0.5
Series
Minimum
setting unit
Detection
method
Applicable
fluid
Minimum
setting unit
Detection
method
Applicable
fluid
Thermal
type
(MEMS)
Thermal
type
(MEMS)
Air
N
2
Air
N
2
Argon
CO
2
Dry air
N
2
0.1 L/min
0.5 L/min
1 L/min
2 L/min
5 L/min
5 L/min
10 L/min
Thermal
type
(MEMS)
Bypass
flow type
Thermal
type
(Thermistor)
Air
N
2
0.1 L/min
0.01 L/min
1 L/min
Dry air
N
2
Thermal
type
(MEMS)
Bypass
flow type
1 L/min
1
2
3
−3
−2
−1 −0.5
0
0.5
Rated flow range [L/min]
PFMV
PFM
PF2A
PFMB
PFMC
−1
−3
1
20
2000
5
500
10
1000
20
2000
0
1
0
3
3
0
0.5
Flow Switch Flow Rate Variations
277
PFM
PFMV
PFMB
PFMC
PF2A
PF3W
PF2D
LFE
IF
PFMC
