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HEC-OM-S002
Table of Contents
TOC-
1
Table of Contents
Chapter 1
Safety Instructions ............................................................... 1-1
1.1
Dangers, Warnings, and Cautions Used in This Manual........................................1-1
1.1.1
Hazard Levels ..................................................................................................................... 1-1
1.1.2
Definitions of “Serious injury” and “Minor injury” ................................................................. 1-2
1.1.3
Symbols............................................................................................................................... 1-2
1.2
Hazard Warning Labels .............................................................................................1-4
1.2.1
Content of label ................................................................................................................... 1-4
1.2.2
Location of hazard warning labels....................................................................................... 1-5
1.3
Location of Alarm Label ............................................................................................1-5
1.4
Location of Piping and Connector Label.................................................................1-6
1.5
Location of Model Label............................................................................................1-6
1.6
Safety Measures.........................................................................................................1-7
1.6.1
Precautions ......................................................................................................................... 1-7
1.6.2
Protective Equipment .......................................................................................................... 1-8
1.6.3
Long-term Storage............................................................................................................... 1-8
1.6.4
Disposing of Product ........................................................................................................... 1-8
1.7
Safety Interlocks ........................................................................................................1-9
Chapter 2
Description and Function of Each Part .............................. 2-1
Chapter 3
Transporting and Installation .............................................. 3-1
3.1
Transporting ...............................................................................................................3-1
3.2
Installation ..................................................................................................................3-2
3.2.1
Installation Conditions ......................................................................................................... 3-2
3.2.2
Installation in Clean Room .................................................................................................. 3-3
3.2.3
Pollution Degree.................................................................................................................. 3-3
3.2.4
Installation of Brackets ........................................................................................................ 3-4
3.3
Wiring..........................................................................................................................3-5
3.3.1
Power Sourse Specification ................................................................................................ 3-6
3.3.2
Power Supply Cable and Connector ................................................................................... 3-6
3.3.3
Connector for External Equipment ...................................................................................... 3-7
3.3.4
Procedures for wiring instllation .......................................................................................... 3-7
3.4
Installation of Facility Water Piping .........................................................................3-8
Chapter 4
System Set-up....................................................................... 4-1
4.1
Pre-check....................................................................................................................4-1
4.2
Facility Water..............................................................................................................4-1
4.2.1
Reference of water quality .................................................................................................. 4-1
4.2.2
Facility water run through.................................................................................................... 4-2
4.3
Filling Bath liquid.......................................................................................................4-2