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27-
4.2.2.
Vacuum/ReleaseInstruction
Table 4-10. Vacuum/ReleaseInstruction
byte bit
Content
Description
Remark
3
0 Vacuum instruction of CH0 ejector
Supply valve type : N.O.
0 : Vacuum instruction ON or
release instruction OFF
1 : Vacuum instruction OFF or
release instruction ON
Supply valve type : N.C.
0 : Vacuum instruction OFF or
release instruction OFF
1 : Vacuum instruction ON or
release instruction ON
1 Release instruction of CH0 ejector
2 Vacuum instruction of CH1 ejector
3 Release instruction of CH1 ejector
4 Vacuum instruction of CH2 ejector
5 Release instruction of CH2 ejector
6 Vacuum instruction of CH3 ejector
7 Release instruction of CH3 ejector
4
0 Vacuum instruction of CH4 ejector
Supply valve type : N.O.
0 : Vacuum instruction ON or
release instruction OFF
1 : Vacuum instruction OFF or
release instruction ON
Supply valve type : N.C.
0 : Vacuum instruction OFF or
release instruction OFF
1 : Vacuum instruction ON or
release instruction ON
Occupy when
vacuum manifold
consists of 8/12/16
stations.
1 Release instruction of CH4 ejector
2 Vacuum instruction of CH5 ejector
3 Release instruction of CH5 ejector
4 Vacuum instruction of CH6 ejector
5 Release instruction of CH6 ejector
6 Vacuum instruction of CH7 ejector
7 Release instruction of CH7 ejector
5
0 Vacuum instruction of CH8 ejector
Supply valve type : N.O.
0 : Vacuum instruction ON or
release instruction OFF
1 : Vacuum instruction OFF or
release instruction ON
Supply valve type : N.C.
0 : Vacuum instruction OFF or
release instruction OFF
1 : Vacuum instruction ON or
release instruction ON
Occupy when
vacuum manifold
consists of 12/16
stations.
1 Release instruction of CH8 ejector
2 Vacuum instruction of CH9 ejector
3 Release instruction of CH9 ejector
4 Vacuum instruction of CH10 ejector
5 Release instruction of CH10 ejector
6 Vacuum instruction of CH11 ejector
7 Release instruction of CH11 ejector
6
0 Vacuum instruction of CH12 ejector Supply valve type : N.O.
0 : Vacuum instruction ON or
release instruction OFF
1 : Vacuum instruction OFF or
release instruction ON
Supply valve type : N.C.
0 : Vacuum instruction OFF or
release instruction OFF
1 : Vacuum instruction ON or
release instruction ON
Occupy when
vacuum manifold
consists of 16
stations.
1 Release instruction of CH12 ejector
2 Vacuum instruction of CH13 ejector
3 Release instruction of CH13 ejector
4 Vacuum instruction of CH14 ejector
5 Release instruction of CH14 ejector
6 Vacuum instruction of CH15 ejector
7 Release instruction of CH15 ejector
Note
"0" indicates that the supply or release valve is energization OFF and "1" indicates that the supply
or release valve is energization ON.
If vacuum instruction and release instruction are turned ON simultaneously on one CH, the
vacuum instruction has priority and only the supply valve is opened.