www.Siargo.com
MF4700
User
Manual
5
|
P a g e
1.
Overview
All
contact
information
can
be
found
at
the
end
of
this
manual.
This
manual
provides
essential
information
for
the
operation
of
the
MF4700
series
of
gas
mass
flow
meters
for
general
‐
purpose
gas
flow
monitor
and
control
applications.
The
product
performance,
maintenance,
and
trouble
‐
shooting
as
well
as
the
information
for
product
order,
technical
support,
and
repair
are
also
included.
MF4700
mass
flow
meters
are
designed
for
general
purpose
precise
industrial
gas
processing
monitor,
or
control.
The
meter
series
cover
a
wide
dynamic
flow
range
with
a
working
pressure
rating
of
up
to
1.0
MPa,
and
a
temperature
ranging
from
‐
10
to
55°C.
The
meters
are
operated
with
Siargo’s
proprietary
MEMS
calorimetric
mass
flow
sensors
together
with
the
smart
control
electronics.
The
sensor
surface
is
passivated
with
silicon
nitride
ceramic
materials
together
with
a
water/oil
proof
nano
‐
coating
for
performance
and
reliability.
The
meter
body
is
made
of
either
aluminum
alloy
or
stainless
steel
that
is
available
for
applications
of
most
of
the
gases.