9
05. Installation
-How to use assemble pipe lines
1) Please check if all parts are in the package;
-1 panel of 1 Flow meter and valve,
-3 pipe lines with nuts,
-1 Gas gauge with valve
Fig-3) In case of Pipe parts for 2 gas channels; 1 panel of 2 Flow-meters and valves, 4 pipe
lines with nuts, 1 Gas gauge with valve.
Fig-3)
Fig-2)
Summary of Contents for SH-FU-100TH-WG
Page 1: ...1 SH FU 50 80 100 120TH WG 1500 C TUBE FURNACE Gas Flow Package Version 2020 Rev 0...
Page 5: ...5 50 80 100 120TH 03 The Outward...
Page 7: ...7 05 Installation...
Page 11: ...11 06 Setting and Operation 1 Controller...
Page 12: ...12 06 Setting and Operation...
Page 13: ...13 06 Setting and Operation...
Page 14: ...14 06 Setting and Operation...
Page 15: ...15 06 Setting and Operation...
Page 16: ...16 07 Specifications 1500 Tube Furnace Gas Flow Package 50 80 100 120TH WG...
Page 17: ...Memo...
Page 18: ...Memo...
Page 19: ...Memo...
Page 20: ......
