Table of Contents
Keep this manual on-hand so it can be used by all operators of the unit.
Use the unit only in the way described in this manual.
Failure to follow the instruction in this manual may cause wrong
operation.
1.
General Description …………………………………………………………3
2.
Graphic Symbols ………………………………………………………………4
3.
The Outward …………………………………………………………………5
4.
Key Feature ……………………………………………………………………6
5.
Installation ………………………………………………………………………7
6.
Setting and Operation …………………………………………………… 11
7.
Specification ………………………………………………………………… 16
Summary of Contents for SH-FU-100TH-WG
Page 1: ...1 SH FU 50 80 100 120TH WG 1500 C TUBE FURNACE Gas Flow Package Version 2020 Rev 0...
Page 5: ...5 50 80 100 120TH 03 The Outward...
Page 7: ...7 05 Installation...
Page 11: ...11 06 Setting and Operation 1 Controller...
Page 12: ...12 06 Setting and Operation...
Page 13: ...13 06 Setting and Operation...
Page 14: ...14 06 Setting and Operation...
Page 15: ...15 06 Setting and Operation...
Page 16: ...16 07 Specifications 1500 Tube Furnace Gas Flow Package 50 80 100 120TH WG...
Page 17: ...Memo...
Page 18: ...Memo...
Page 19: ...Memo...
Page 20: ......
