52
Gas flow control is accomplished manually with flowmeters. See
section 2.12.4 for operating instructions.
7.4.3.
Installation Requirements
Hydrogen is a flammable gas and, under certain conditions, it can be
explosive. The user of this equipment must take adequate precautions to
prevent the escape of hydrogen into the room air and to eliminate possible
sources of ignition from the working environment. A common practice is to
vent the upper part of the ceiling of the room containing the furnace, and to
install a hydrogen leak detector system.
7.4.3.1.
The room containing the furnace must be arranged to prevent direct
air drafts from hitting the furnace. A direct air draft at the entrance
or exit end of the furnace will unbalance the gas curtains and could
cause hydrogen to escape into the room, or create an explosive
mixture of air and hydrogen inside the furnace.
CAUTION: The flowmeters installed in the control panel are rated
for 70 psi maximum; operating beyond 70 psi exposes the operator
to possible injury.
7.4.4.
Operating Instructions, OPTO22 Control System
7.4.4.1.Process Screen Controls and Indicators (Hydrogen Atmosphere)
Go to Process screen and click on “H
2
.” Button. Click on “Warm-Up”.
Wait until the process start light is flashing, and click on “Process Start”.
This starts an automatic timed purge with nitrogen and lasts from 5 to
30 minutes. When the purge cycle is complete, click on “Combustible
Gas On”. Nitrogen will be shut off and hydrogen will be turned on.
7.4.4.2.Hydrogen/Nitrogen (Forming Atmosphere)
Go to Process screen. Click on “Forming” button. Click on “Warm-
Up”. Wait until the process start light is flashing, and click on “Process
Start”. This starts an automatic timed purge with nitrogen and lasts from
5 to 30 minutes.
When the purge cycle is complete, click on “Combustible Gas On” and
hydrogen will be turned on. This starts an automatic timed fill (manual
set).
NOTE: Fill is defined as the amount of time required for the
combustible gas to enter and fill the chamber cavity. Fill time is
factory preset for 5 minutes, and can be user altered.
7.4.4.3.Terminate
Click on “Cooldown” (this returns the furnace to nitrogen operation), or
go to Recipe screen and “Load Run” a new recipe.
Summary of Contents for 2115150301
Page 23: ...22 Figure 3 8 1 1 Event Logging ...
Page 44: ...43 Section 6 PRODUCT SPECIFICATION 6 PRODUCT SPECIFICATION ...
Page 62: ...61 View Product Tracking ...
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