GD-70D
- 124 -
Detection Gas
Full Scale
Alarm 1
Alarm 2
COS (Carbonyl sulfide)
0 - 2,000 ppm
500 ppm
1,000 ppm
0 - 90.0 ppm
30.0 ppm
60.0 ppm
COF2 (Cobalt difluorine)
0 - 6.00 ppm
2.00 ppm
4.00 ppm
DEA (Diethylamine)
0 - 15.0 ppm
5.0 ppm
10.0 ppm
DMA (Dimethylamine)
0 - 15.0 ppm
5.0 ppm
10.0 ppm
F2 (Fluorine)
0 - 1.00 ppm
0.30 ppm
0.60 ppm
0 - 3.00 ppm
1.00 ppm
2.00 ppm
GeH4 (Germane)
0 - 0.80 ppm
0.20 ppm
0.40 ppm
H2 (Hydrogen)
0 - 100 %LEL
10% LEL
50% LEL
0 - 2.00 %volume
(NCU Type)
1.00%
1.00%
0 - 2.00 %volume
(SGU Type)
0.50%
1.00%
0 - 500 ppm
200 ppm
400 ppm
0 - 1,000 ppm
250 ppm
500 ppm
0 - 2,000 ppm
500 ppm
1,000 ppm
0 - 4,000 ppm
1,000 ppm
2,000 ppm
H2Cl2Si (Dichlorosilane)
0 - 15.0 ppm
5.00 ppm
10.0 ppm
H2O2 (Hydrogen peroxide)
0 - 3.00 ppm
1.00 ppm
2.00 ppm
H2S (Hydrogen sulfide)
0 - 1.00 ppm
0.30 ppm
0.60 ppm
0 - 30.0 ppm
10.0 ppm
20.0 ppm
H2Se (Hydrogen selenide)
0 - 0.20 ppm
0.05 ppm
0.10 ppm
H9NSi3 (Trisilylamine)
0 - 15.0 ppm
5.0 ppm
10.0 ppm
HBR (Hydrogen bromide)
0 - 6.00 ppm
2.00 ppm
4.00 ppm
0 - 9.00 ppm
3.00 ppm
6.00 ppm
HCl (Hydrogen chloride)
0 - 6.00 ppm
2.00 ppm
4.00 ppm
0 - 15.0 ppm
5.0 ppm
10.0 ppm
HCN (Hydrogen cyanide)
0.9 - 15.0 ppm
4.0 ppm
10.0 ppm
HCOOH (Formic acid)
0 - 15.0 ppm
5.0 ppm
10.0 ppm
HF (Hydrogen fluoride)
0.4 - 3.00 ppm
1.00 ppm
2.00 ppm
0.4 - 9.00 ppm
3.00 ppm
6.00 ppm
HNO3 (Nitric acid)
0 - 20.0 ppm
5.0 ppm
10.0 ppm
IPA (Isopropyl alcohol)
0 - 2,000 ppm
500 ppm
1,000 ppm
0 - 100 %LEL
25% LEL
25% LEL
N2O (Nitrous oxide)
0 - 500 ppm
50 ppm
100 ppm
N2H4 (Hydrazine)
0 - 5.00 ppm
1.50 ppm
3.00 ppm
NF3 (Nitrogen trifluoride)
0 - 30.0 ppm
10.0 ppm
20.0 ppm
NH3 (Ammonia)
0 - 75.0 ppm
25.0 ppm
50.0 ppm