9 Troubleshooting
9-2. <OUT OF SPECIFICATION>
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9-2. <OUT OF SPECIFICATION>
Display
State explanation
Main cause and required action
Sonic sensor unit:
Out-of-measurement-range measuring gas
detected
Check that the conditions
specified in the "Measuring gas
specification sheet" are met.
Sonic sensor unit:
Out-of-specification temperature detected
Reconsider the operating
environment.
Optical sensor unit:
Out-of-measurement-range measuring gas
detected
Check that the conditions
specified in the "Measuring gas
specification sheet" are met.
Optical sensor unit:
Out-of-defined-range reference gas flow
rate detected
Adjust the reference gas flow
rate so that the black circle
comes between the two solid
lines that represent the upper
and lower limits.
Optical sensor unit:
Out-of-defined-range measuring gas flow
rate detected
Adjust the measuring gas flow
rate so that the black circle
comes between the two solid
lines that represent the upper
and lower limits.
Optical sensor unit:
Sudden change in GAS OUT absolute
pressure detected
Reconsider the GAS OUT
exhaust destination or the GAS
OUT diffusion structure.
Optical sensor unit:
Out-of-measurement-range GAS OUT
absolute pressure detected
Check the absolute pressure of
the GAS OUT exhaust line and
the GAS OUT tubing for
abnormality.
Ⅱ2G Ex dbⅡB+H2 T4 Gb
