2 Safety and handling
8
There may be additional limitations to operation, maintenance, and
service procedures not mentioned in this manual as well as industry-
approved methods and procedures which must be observed. If you
have any doubt regarding approved procedures, contact safety
personnel at your company, or representatives of your state, territory
or province, or federal government.
Therefore,
•
No operator should perform any normal operations without prior
training. Operation procedures are described in this Operation
manual.
•
Allow only trained personnel to perform maintenance procedures.
Maintenance procedures are described in this Operation manual.
•
Only authorized service personnel are allowed to service the
system. Service procedures are described in the system service
manual, which is only available for Raith’s service engineers only.
2.3.1 X-ray radiation
The system produces X-rays, if the high voltage is switched on. Under
no mode of operation the measured X radiation exceeds 1µSv/h at a
distance of 0.1m from any surface of the system. To insure this,
Do not remove the cover, especially near the column.
Never attempt maintenance of any kind on the electron column other
than that described in this Operation manual.
Servicing the column is restricted to service engineers.
According to German Law (X-ray Protection Directive revised June
18, 2002 or Röntgenverordnung geändert am 18. Juni 2002) the
operation of this e-beam lithography-System is not subject to official
permission. Outside Germany, the user of this e-beam lithography-
System must observe the specific regulations of the country where the
system is installed. See provided important document for further
details.
Should you find that any of the stickers is missing on your instrument
please notify us. We will send you a replacement.
2.3.2 High voltages
Your system uses lethal high voltages up to 30 kV. Therefore,
Touching the power supply may result in death or serious injury.
For the same reason do not change the instrument’s connections
especially the grounding to the main power line.
The system is equipped with interlocks to minimize hazards.
