5 Maintenance of system
24
STEP 2
►
Move to the Faraday Cup and increase magnification to 10.000
minimum.
STEP 3
►
Make sure the LEO SEM Detector is set to
In-Lens
.
On the Raith PC perform the following tasks:
STEP 4
►
In the menu bar, under File, select ‘Open Script” and search for the
script file
Beamstability.js
(sometimes under the folder
User > qtest
> Script
). Contact Raith if you do not have this file!
STEP 5
►
Press the green arrow in that window to execute the script.
STEP 6
►
The
Grapher
program will start. Contact Raith if you do not have this
program!
STEP 7
►
Return to the Raith software and enter 30 sec for the interval.
STEP 8
►
Let the script run for at least 8 hours.
STEP 9
►
When finished, select “Cancel”. The data will automatically be saved
to the file: C:\Raith150\beamcurrent.dat or .rag.
STEP 10
►
Copy this file to a new location for reference purposes. If in doubt,
how to interpret the data email it to a Raith service engineer for
analysis.
5.3 Utility maintenance
In the following some general maintenance rules are described.
5.3.1 Chillers
Monitoring water levels in the Haake (objective lens) and Haskris or
Neslab (main system) chillers:
•
The Haake chiller holds about 2 gallons of distilled water. The
Haskris holds 5 gallons of distilled water, and the Neslab holds
1.1 gallons of distilled water. The refilling interval depends on the
lab humidity. The water level should be checked every 1-2 weeks
until the actual consumption rate is known.
•
Flow Rate: The flow rate of the Haake has three settings: Slow,
Medium and Fast. This should be set to Slow or Medium in the
digital menu. The Haskris should be operating at about 30 GPH.
•
Check the flow rate periodically. A decrease in the flow rate could
indicate a clogged filter. The differential pressure should be 45
psi. The Neslab typically operates at around 20 psi.
