Q150T Sample Preparation System
10473 - Issue 5
82
Q150T - Instruction Manual
Table 28
Metal Evaporation profile parameters
Name
Default
Value
Minimum
Value
Maximum
Value
Comment
Material
Carbon
Material to be evaporated in this
process
Evaporation
Current (A)
0
0
50
Current applied during the
evaporation pulse
Evaporation time
(Minutes)
1
0.1
4
Duration of evaporation pulse
Out Gas Time
(Seconds)
10
2
60
Time source is outgassed
before evaporation pulse.
Out Gas Current
(A)
20
0
40
Current applied tosource at the
start of outgas step.
Thus allowing automated out
outgassing.
Note the current during the out
gas may be adjusted.
Max Out Gas
Current
(A)
40
0
50
Maximum current that can be
set during outgas
Max Out Gas
Voltage
(V)
10
0
20
The voltage across the rod is
limited to this value during
Outgas
Outgas source
Yes
No
Yes
Include or exclude outgassing
step
Tooling Factor
5
0.1
10
Tooling factor for this process
Pump hold
No
No
Yes
If
Yes,
Q150T pumps down to
outgas-ready state and waits for
user input.
Note:
If hold time (set in
System | Vacuum | Pump hold
time
– see page 46) is
exceeded, Q150T vents
chamber.
Flush chamber
No
No
Yes
Set to
Yes
to flush chamber
with nitrogen before pumping
down.
Summary of Contents for Q150T E
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