5
/
12
V1.0
Back Panel
Installation Requirements
Tools Preparation
Flathead screwdrivers
Phillips screwdrivers
ESD-preventive wrist strap
Temperature/Humidity Requirements
:
Cleanliness Requirements
:
Substance
Unit
Concentration limit
DUST
Particle/m3 ≤ 3 X 104 (No visible dust on the tabletop for three days)
SO2
mg/m3
0.2
H2S
mg/m3
0.006
NH3
mg/m3
0.05
Cl2
mg/m3
0.01
Note: The dust particle size is ≥ 5 μm
Temperature
Humidity
0~45°C
10%
~
95%