PTS-G5K13M
PTS Co., Ltd.
7
2. System Standard
2-1 Basic specifications
Model
PTS-G3K13M
Power Supply
Ac200V±10% 3Φ 50/60Hz 9kVA
Output Power
3kW
Output Frequency
13.56MHz ±0.005%
Line Regulation
±0.5%
Power
0(RF-OFF), 2 ~100%
RF Output accuracy
±2%
Output Deviation
±2% 설정한 값 또는 ±2W , 둘 중 큰 값
Spurious
2f : -40dB
3f : -45dB
Output Impedance
50Ω
Arc cut detecting
<2usec
RF Connector Type
“HN” Type Connector
Slow UP / DOWN Time
0.3sec ± 0.1sec
Cooling Type
Air / Water
Water Supply : 7ℓ/min(10 ~30℃)
Water Connector : RC-3/8
Use Condition
Temperature : 5 ~ 40℃
Humidity : 10 ~ 80%
Size
267 * 146 * 480mm
Case
Front Panel : Gray
