PI P-73 Series, User Manual

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10 Technical Data
P-73x Nanopositioners PZ103E Version: 1.0.0 49
Pin Signal Function
10 Input Piezo v, channel 1
11 Input Target sensor signal, channel 1
(movable part of the capacitive sensor)
12 GND Shield of Target sensor signal, channel 2
13 GND Shield of Target sensor signal, channel 3
14 Free –
15 Free –
16 Free –
17 Free –
18 Input Piezo voltage –, channel 4
19 Input Piezo voltage –, channel 3
20 Input Piezo voltage –, channel 2
21 Input Piezo voltage –, channel 1
22 GND Shield of Target sensor signal, channel 1
Stage-dependent assignment of the Sub-D mix connector 25W3 (X = used):
Stage Piezo Voltage Sensor Signal
(Probe / Target / Shield)
Chan-
nel 1
Pins 10
and 21
Chan-
nel 2
Pins 9
and 20
Chan-
nel 3
Pins 8
and 19
Chan-
nel 4
Pins 7
and 18
Channel
1
Pins A3,
11 and 22
Channel
2
Pins A1,
1 and 12
Channel 3
Pins A2, 2
and 13
P-733.2CD
X X – – X X –
P-733.2DD
X X – – X X –
P-733.3CD
X X X – X X X
P-733.3DD
X X X – X X X
P-734.2CD
X X – – X X –