PI P-73 Series, User Manual

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3 Product Description
P-73x Nanopositioners PZ103E Version: 1.0.0 9
In this Chapter
Features and Applications ............................................................................................. 9
Model Overview ........................................................................................................... 10
Product View ............................................................................................................... 11
Scope of Delivery ........................................................................................................ 12
Technical Features ...................................................................................................... 12
3.1 Features and Applications
P-73x stages are piezo-actuator-driven precision positioning systems with up to three
motion axes.
Piezo actuators expand when an electric voltage is applied. The motion of the piezo
actuators and levers is used by the P-73x to achieve travel ranges of up to 100
μm
with resolutions in the nanometer range.
In order to achieve the specifications stated in the data table (p. 37), the stage is
calibrated at the factory as a system component with suitable electronics. The
electronics and mechanical system only offer optimum performance as a complete
calibrated system.
The electronics must be ordered separately. For suitable electronics, see
"Recommended Piezo Controllers" (p. 50).
Vacuum-compatible versions of the P-73x are available on request.
3 Product Description