PI P-73 Series, User Manual

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10 Technical Data
P-73x Nanopositioners PZ103E Version: 1.0.0 37
In this Chapter
Specifications .............................................................................................................. 37
Dimensions .................................................................................................................. 41
Torque for Stainless Steel Screws (A2-70) ................................................................. 46
Pin Assignment ............................................................................................................ 47
Suitable Piezo Controllers ........................................................................................... 50
10.1 Specifications
10.1.1 Data Table
Unit P-733.2CD
P-733.2CL
P-733.3CD
P-733.3CL
P-733.2DD P-733.3DD P-734.2CD
P-734.2CL
P-733.ZCD
P-733.ZCL
Active axes X, Y X, Y, Z X, Y X, Y, Z X, Y Z
Motion and
positioning
Integrated sensor Capacitive Capacitive Capacitive Capacitive Capacitive Capacitive
Open-loop travel in
X, Y, –20 to +120 V µm 115 115 33 33 110 –
Open-loop travel in
Z, –20 to +120 V µm – 12 – 14 – 115
Closed-loop travel in
X, Y µm 100 100 30 30 100 –
Closed-loop travel in
Z µm – 10 – 10 – 100
Open-loop resolution
in X, Y
nm 0.2 0.2 0.1 0.1 0.2 –
Open-loop resolution
in Z nm – 0.1 – 0.1 – 0.2
Closed-loop
resolution in X, Y nm 0.3 0.3 0.1 0.1 0.3 –
Closed-loop
resolution in Z nm – 0.2 – 0.1 – 0.3
Linearity
deviation in X, Y % 0.03 0.03 0.03* 0.03* 0.03 –
Linearity
deviation in Z
% – 0.03 – 0.03* – 0.03
Repeat-
ability in X, Y nm <2 <2 < 2 <2 <2.5 –
10 Technical Data